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使用旋涂技术制备用于存储器件的光学透明、无针孔氧化镍薄膜的协议。

Protocol for fabricating optically transparent, pinhole-free NiO thin film for memory devices using the spin-coating technique.

作者信息

Adiba Adiba, Mayanglambam Franco, Ahmad Tufail

机构信息

Department of Physics, Aligarh Muslim University, Aligarh, Uttar Pradesh 202002, India.

Centre for Nanotechnology, IIT Guwahati, Guwahati, Assam 781039, India.

出版信息

STAR Protoc. 2025 Jun 20;6(2):103732. doi: 10.1016/j.xpro.2025.103732. Epub 2025 Apr 4.

DOI:10.1016/j.xpro.2025.103732
PMID:40186863
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12002987/
Abstract

Fabricating visibly transparent and uniform metal oxide thin films is a significant challenge. Here, we present a protocol for the fabrication of NiO thin films. We detail the essential steps for substrate preparation. We then describe the optimized steps for spin coating, considering various parameters such as the concentration of the precursor solution, drying temperature, annealing temperature, and spin-coating speed.

摘要

制造出明显透明且均匀的金属氧化物薄膜是一项重大挑战。在此，我们展示一种制备氧化镍薄膜的方法。我们详细说明了基板制备的关键步骤。然后，我们考虑诸如前驱体溶液浓度、干燥温度、退火温度和旋涂速度等各种参数，描述了旋涂的优化步骤。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/04ffbf3ff787/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/48391907c5b5/fx1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/ab05effb7072/gr1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/b846983b31ea/gr2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/53fded54f974/gr3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/04ffbf3ff787/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/48391907c5b5/fx1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/ab05effb7072/gr1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/b846983b31ea/gr2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/53fded54f974/gr3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d19b/12002987/04ffbf3ff787/gr4.jpg

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本文引用的文献

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Nat Commun. 2024 Dec 4;15(1):10554. doi: 10.1038/s41467-024-54925-4.
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Unveiling the potential of NiO-ZnCoO nano-composites: Electrical, optical, electrochemical and antibacterial investigation.揭示NiO-ZnCoO纳米复合材料的潜力：电学、光学、电化学及抗菌性能研究
Heliyon. 2024 Jul 18;10(15):e34880. doi: 10.1016/j.heliyon.2024.e34880. eCollection 2024 Aug 15.
3
Out-of-equilibrium processes in crystallization of organic-inorganic perovskites during spin coating.
旋涂过程中有机-无机钙钛矿结晶的非平衡过程。
Nat Commun. 2021 Sep 24;12(1):5624. doi: 10.1038/s41467-021-25898-5.
4
A Low-Cost NiO Hole Transfer Layer for Ohmic Back Contact to Cu O for Photoelectrochemical Water Splitting.一种用于光电化学水分解中与CuO形成欧姆背接触的低成本NiO空穴传输层。
Small. 2017 Oct;13(39). doi: 10.1002/smll.201702007. Epub 2017 Aug 8.