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使用石英晶体微天平对光刻胶中的光降解进行实时监测。

Real-time monitoring of photodegradation in photoresists using a quartz crystal microbalance.

作者信息

Gu Zhun, Yang Kaitong, Boamah Hayford, Chen Dong, Zhu Zhiqiang, Wang Jie

机构信息

School of Biomedical Sciences, Suzhou Chien-shiung Institute of Technology 1 Jianxiong Road Suzhou 215411 China

Institute for Advanced Materials, Jiangsu University Zhenjiang 212013 China

出版信息

RSC Adv. 2025 Apr 17;15(16):12304-12308. doi: 10.1039/d4ra05762g. eCollection 2025 Apr 16.

DOI:10.1039/d4ra05762g
PMID:40248237
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12004366/
Abstract

We report a quantitative method for the real-time evaluation of photoresist performance that integrates laser irradiation with quartz crystal microbalance (QCM) sensing technology. The results obtained for the model photoresist AZ1518 correlated with the traditionally obtained ones. Furthermore, the system revealed viscoelastic transitions and shear stress evolution during photoreactions.

摘要

我们报告了一种用于光刻胶性能实时评估的定量方法，该方法将激光辐照与石英晶体微天平（QCM）传感技术相结合。针对模型光刻胶AZ1518获得的结果与传统方法获得的结果相关。此外，该系统揭示了光反应过程中的粘弹性转变和剪切应力演变。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a809/12004366/6282dcc209c8/d4ra05762g-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a809/12004366/38dfcab34eef/d4ra05762g-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a809/12004366/87cce55932fb/d4ra05762g-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a809/12004366/80b912500474/d4ra05762g-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a809/12004366/6282dcc209c8/d4ra05762g-f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a809/12004366/38dfcab34eef/d4ra05762g-f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a809/12004366/87cce55932fb/d4ra05762g-f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a809/12004366/80b912500474/d4ra05762g-f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a809/12004366/6282dcc209c8/d4ra05762g-f4.jpg

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Proteins at polysaccharide-based biointerfaces: A comparative study of QCM-D and electrokinetic measurements.多糖基生物界面上的蛋白质：QCM-D 和电泳测量的比较研究。
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A new methodology combining QCM-D and proteomic profiling enables characterization of protein adsorption on 2D surfaces.
一种将 QCM-D 和蛋白质组学分析相结合的新方法能够实现对 2D 表面蛋白质吸附的特性分析。
J Colloid Interface Sci. 2023 Jan 15;630(Pt A):965-972. doi: 10.1016/j.jcis.2022.10.090. Epub 2022 Oct 23.
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Evolution in Lithography Techniques: Microlithography to Nanolithography.光刻技术的演进：从微光刻到纳米光刻。
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Review of recent advances in inorganic photoresists.无机光刻胶的最新进展综述。
RSC Adv. 2020 Feb 28;10(14):8385-8395. doi: 10.1039/c9ra08977b. eCollection 2020 Feb 24.
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