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使用泡罩型动态释放聚合物实现全彩微型发光二极管的高产率和高精度传质

High-Yield and High-Accuracy Mass Transfer of Full-Color Micro-LEDs Using a Blister-Type Dynamic Release Polymer.

作者信息

Huang Xinrui, Liu Qian, Jiang Jinkun, Tang Xuehuang, Lin Xin, Xie Yujie, Lang Taifu, Huang Zhonghang, Yan Qun, Lin Chang, Sun Jie

机构信息

National and Local United Engineering Laboratory of Flat Panel Display Technology, College of Physics and Information Engineering, Fuzhou University, Fuzhou 350100, China.

Fujian Science & Technology Innovation Laboratory for Optoelectronic Information of China, Fuzhou 350100, China.

出版信息

ACS Appl Mater Interfaces. 2025 May 14;17(19):28622-28631. doi: 10.1021/acsami.5c01531. Epub 2025 Apr 29.

Abstract

Micro light-emitting diode (Micro-LED) is widely regarded as a highly promising technology in the current display field due to its excellent performance, but the core issue hindering the further development of Micro-LED is how to achieve high-precision and high-yield transfer. In this study, laser-induced forward transfer (LIFT) is adopted as the main technique, and a novel blister-type dynamic release layer (DRL) material is selected, characterized by a gentle transfer process and minimal residue on the chip after transfer. Chip-on-wafer (COW) is a structure that fabricates a large number of Micro-LEDs (15 × 30 μm) on a sapphire substrate. The COW-on-head (COH) chip bonding method can control the uniformity of the overall chip height before transfer within 3.5%, which is favorable for subsequent stable transfer. Based on the analysis of the close relationship between the transfer gap and laser energy density, this study successfully achieved the transfer of red/green/blue (R/G/B) Micro-LED chips (6400, respectively) onto the corresponding chip-on-carrier 2 (COC-2), and all of them have achieved a one-step transfer yield of over 99.3% and an average chip transfer offset of 2 μm or less. It is worth mentioning that the one-step transfer yield mentioned in this paper is different from the yield after testing and repairing the chips. The one-step transfer yield can fully reflect the transfer quality. In order to verify the validity of this study, a 1 in., full-color, active Micro-LED display with a pixel size of 114 pixels per inch (PPI) and a display brightness of 5598 cd/m was successfully fabricated. This study proposes an optimized solution for Micro-LED transfer technology, which will help accelerate the mass production and marketization of Micro-LED.

摘要

微发光二极管(Micro-LED)因其卓越性能在当前显示领域被广泛视为一项极具前景的技术,但阻碍Micro-LED进一步发展的核心问题是如何实现高精度、高良率转移。本研究采用激光诱导正向转移(LIFT)作为主要技术,并选用了一种新型泡状动态释放层(DRL)材料,其特点是转移过程温和且转移后芯片上残留极少。晶圆上芯片(COW)是一种在蓝宝石衬底上制造大量微发光二极管(15×30μm)的结构。COW-on-head(COH)芯片键合方法可将转移前整体芯片高度的均匀性控制在3.5%以内,这有利于后续的稳定转移。基于对转移间隙与激光能量密度密切关系的分析,本研究成功将红/绿/蓝(R/G/B)微发光二极管芯片(各6400个)转移到相应的第二代芯片载体(COC-2)上,且所有芯片均实现了一步转移良率超过99.3%,平均芯片转移偏移量在2μm或更小。值得一提的是,本文提到的一步转移良率与芯片测试和修复后的良率不同。一步转移良率能充分反映转移质量。为验证本研究的有效性,成功制造出了一款1英寸、像素尺寸为每英寸114像素(PPI)、显示亮度为5598cd/m²的全彩有源微发光二极管显示器。本研究为微发光二极管转移技术提出了一种优化解决方案,这将有助于加速微发光二极管的大规模生产和市场化。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b1c4/12086838/f2376073000a/am5c01531_0001.jpg

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