Loh Joel Y Y, Yuan Jason, Moor-Smith Samuel, Glustein Adam, Vytas Gloria, Taylor Will, Lombo Andres, Curry Richard J, Kherani Nazir Pyarali
Department of Electrical and Computer Engineering, University of Toronto, Toronto, Ontario, M5S 3G4, Canada.
Department of Electrical and Electronic Engineering, Photon Science Institute, University of Manchester, Alan Turing Building, Oxford Rd, Manchester, M13 9PY, United Kingdom.
Adv Sci (Weinh). 2025 Jun;12(22):e2416305. doi: 10.1002/advs.202416305. Epub 2025 May 9.
Metal filamentation based mechanisms have the advantage of a high switching current ratio, yet typically require high switching voltages to activate the memristive device due to the primary mechanism of atomic vacancy filling and movement. Herein, Introducing non-reactive nitrogen gas during plasma sputtering of silver is shown to prime the overlying metal nitride layer to achieve low threshold switching at applied biases of below 60 millivolts. Residual nitrogen species within the silver under-layer promote the creation of nano-sized void defects within the superjacent dielectric layer, which, coupled with residual stresses in the gigapascal range, enable sub-micron filamentation growth. These memristor devices function similarly to potassium ion channels, displaying current growth and relaxation patterns that align with the Hodgkin-Huxley model, and as such are amenable to the development of artificial neuron structures. Further, a diverse set of neuromorphic behaviors not seen within typical metal filamentation based memristors is observed. This includes multi-peak synaptic weight changes in the device's response to spiked stimuli. Both the switching voltages and neuromorphic properties are linked to the nitrogen-argon pressure during silver deposition. Interestingly, these devices also exhibit lateral growth of silver filamentation across the surface of the metal nitride thin film layer with gaps of more than a hundred micrometers, suggesting that the underlying silver undergoes accumulation and breakthrough. The filling of large micro-voids with Ag generates large nanoparticles that easily propagate, enabling a large diffusion front and faster filamentation time, whereas small micro-voids create a bottleneck in the filamentation process. Additionally, the introduction of residual stresses in conventional diffusion theory indicates greater dendritic interconnectivity and thus electrode to electrode connection. This study demonstrates that the facile incorporation of non-reactive gases during the sputter-deposition of a metal electrode opens a path to unique material mechanisms that facilitate the development of versatile memristors.
基于金属丝形成的机制具有开关电流比高的优点,但由于原子空位填充和移动的主要机制,通常需要高开关电压来激活忆阻器件。在此,研究表明在银的等离子体溅射过程中引入非反应性氮气,可以使上层金属氮化物层在低于60毫伏的施加偏压下实现低阈值开关。银底层中的残余氮物种促进了相邻介电层中纳米级空洞缺陷的形成,再加上吉帕斯卡范围内的残余应力,使得亚微米级的丝状物得以生长。这些忆阻器器件的功能类似于钾离子通道,呈现出与霍奇金-赫胥黎模型一致的电流增长和弛豫模式,因此适合用于开发人工神经元结构。此外,还观察到了一系列在典型的基于金属丝形成的忆阻器中未出现的神经形态行为。这包括器件对尖峰刺激响应中的多峰突触权重变化。开关电压和神经形态特性都与银沉积过程中的氮氩压力有关。有趣的是,这些器件还表现出银丝在金属氮化物薄膜层表面横向生长,间隙超过一百微米,这表明底层的银会发生积累和突破。用银填充大的微孔会产生易于传播的大纳米颗粒,从而形成大的扩散前沿和更快的丝状物形成时间,而小的微孔则会在丝状物形成过程中造成瓶颈。此外,传统扩散理论中残余应力的引入表明了更大的树枝状互连性,从而实现电极到电极的连接。这项研究表明,在金属电极的溅射沉积过程中轻松引入非反应性气体,为独特的材料机制开辟了一条道路,有助于开发多功能忆阻器。