Liu Yang, Wang Jie, Wang Zhipeng, Huang Ji, Wang Xuejiao, Zhang Jingjing, Dai Zijie, Ye Yunxia
School of Mechanical Engineering, Jiangsu University, Zhenjiang, 212013, China.
Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing, 100081, China.
Nanophotonics. 2025 Sep 4;14(19):3095-3114. doi: 10.1515/nanoph-2025-0131. eCollection 2025 Sep.
Micro-nano fabrication technology is critical to high-end fabrication, bridging the gap between microscopic and macroscopic scales. Femtosecond laser fabrication, owing to its ultrafast nonlinear effects and three-dimensional direct writing capabilities, has demonstrated unique advantages in the fabrication of functional micro-nano structures. Phase holographically modulated femtosecond laser technology, as a representative of spatial optical field modulation, modulates the phase of the incident laser field to flexibly transform a single focal point into various spatial optical fields, including multifocal arrays, patterned optical fields, and three-dimensional optical fields, according to specific fabrication requirements. This technology not only improves fabrication precision and efficiency but also provides greater flexibility in femtosecond laser fabrication. This review systematically summarizes recent technological advances, focusing on four aspects: algorithms for generating phase holograms, exceeding the diffraction limit to improve fabrication resolution, optimizing fabrication quality, and improving fabrication efficiency. It aims to provide theoretical foundations and technical references to support the practical application of modulated femtosecond laser technology in the fabrication of functional micro-nano structures.
微纳制造技术对于高端制造至关重要，它弥合了微观和宏观尺度之间的差距。飞秒激光制造由于其超快非线性效应和三维直接写入能力，在功能性微纳结构的制造中展现出独特优势。相位全息调制飞秒激光技术作为空间光场调制的代表，根据特定制造要求，调制入射激光场的相位，将单个焦点灵活转换为各种空间光场，包括多焦点阵列、图案化光场和三维光场。该技术不仅提高了制造精度和效率，还在飞秒激光制造中提供了更大的灵活性。本综述系统总结了近期的技术进展，重点关注四个方面：相位全息图生成算法、超越衍射极限以提高制造分辨率、优化制造质量以及提高制造效率。其目的是提供理论基础和技术参考，以支持调制飞秒激光技术在功能性微纳结构制造中的实际应用。
