Zhao Siwei, Cong Hailin, Pan Tingrui
Department of Biomedical Engineering, University of California, Davis, CA 95616, USA.
Lab Chip. 2009 Apr 21;9(8):1128-32. doi: 10.1039/b817925e. Epub 2009 Mar 3.
In this paper, we present a novel rapid-prototyping process for out-of-cleanroom microfabrication of three-dimensional multilayer microfluidic structures with a 10 microm resolution, referred to as the Direct Projection on Dry-film Photoresist (DP(2)). A commercially available digital projector is customized to function as a direct mask generation and photo exposure system, while easy-processing photosensitive dry films are used as the microfluidic constructs. Multilayer alignments among maskless-patterned layers are reliably achieved by using a Software Alignment technique with less than 10 microm precision, which eliminates the use of mechanical travelling stage. The bonding between different layers of dry film, simply enabled by a plasma-assisted thermal lamination, offers an easy implementation for suspended multilayer microstructures. Development of a complex microfluidic chip from computer layout can thus be accomplished within an hour in a regular chemical or biological lab environment using this approach.
在本文中，我们提出了一种新颖的快速成型工艺，用于在洁净室外微制造具有10微米分辨率的三维多层微流体结构，称为干膜光刻胶直接投影法（DP(2)）。定制一台商用数字投影仪，使其作为直接掩膜生成和光刻曝光系统，同时使用易于加工的光敏干膜作为微流体构建材料。通过使用精度小于10微米的软件对准技术，可在无掩膜图案层之间可靠地实现多层对准，从而无需使用机械移动台。干膜不同层之间的键合通过等离子体辅助热层压即可简单实现，为悬浮多层微结构提供了一种易于实施的方法。因此，使用这种方法，在常规化学或生物实验室环境中，从计算机布局开发复杂的微流体芯片可在一小时内完成。
