Dickey Michael D, Lipomi Darren J, Bracher Paul J, Whitesides George M
Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, Massachusetts 02138, USA.
Nano Lett. 2008 Dec;8(12):4568-73. doi: 10.1021/nl8028174.
This paper describes the fabrication of arrays of parallel, electrically addressable metallic nanowires by depositing alternating layers of thin films of metal and polymer-both planar and topographically patterned-and sectioning the laminated structures with an ultramicrotome (nanoskiving). The structures that resulted from this process had two distinct regions: one in which parallel Au nanowires were separated by a minimum distance of 30 nm, and one in which the nanowires diverged such that the distal ends were individually addressable by low-resolution (> or =10 microm) photolithography. Conductive polyaniline (PANI) was electrochemically deposited across the nanowire electrodes to demonstrate their electrical addressability, continuity, and physical separation. Before deposition, the wires were electrically isolated; with the PANI, they were electrically connected. After dry etching to remove the polymer, the gap between the nanowire electrodes returned to an insulating state. This procedure provides a method for making wires with dimensions and separations of <50 nm without the use of e-beam or focused-ion-beam "writing" and opens applications in organic and molecular electronics, chemical and biological sensing, and other fields where nanoscale distances between parallel conductive electrodes are desirable.
本文描述了通过交替沉积金属薄膜和聚合物薄膜（包括平面和具有拓扑图案的薄膜），并用超薄切片机（纳米切片）对层压结构进行切片，来制造平行的、电可寻址金属纳米线阵列的方法。这一过程产生的结构有两个不同区域：一个区域中平行的金纳米线被至少30纳米的最小距离隔开，另一个区域中纳米线发散，使得其远端可通过低分辨率（≥10微米）光刻单独寻址。导电聚苯胺（PANI）通过电化学沉积在纳米线电极上，以证明其电可寻址性、连续性和物理分离性。在沉积之前，这些线是电绝缘的；有了PANI后，它们实现了电连接。在干法蚀刻去除聚合物后，纳米线电极之间的间隙恢复到绝缘状态。该方法提供了一种无需使用电子束或聚焦离子束“写入”即可制造尺寸和间距小于50纳米的导线的方法，并在有机和分子电子学、化学和生物传感以及其他需要平行导电电极之间具有纳米级距离的领域开辟了应用前景。
