Sun Peng, Reano Ronald M
Electroscience Laboratory, Department of Electrical and Computer Engineering, The Ohio State University, Columbus, OH 43212, USA.
Opt Express. 2010 Apr 12;18(8):8406-11. doi: 10.1364/OE.18.008406.
A low power Mach-Zehnder interferometer thermo-optic switch using free-standing silicon-on-insulator strip waveguides is demonstrated. The air gap provides thermal isolation between the waveguide interferometer arms and the underlying silicon substrate. The highly confined optical modes of the strip waveguides enable miniature heated cross-sections. The heating efficiency from on-chip resistive heaters is enhanced. Measurements of fabricated devices using 100 microm arm lengths at 1550 nm wavelength result in a switching power of 540 microW, a 10% - 90% switching rise time of 141 micros, and an extinction ratio of 25 dB.
展示了一种使用独立式绝缘体上硅条形波导的低功率马赫-曾德尔干涉仪热光开关。气隙在波导干涉仪臂与下面的硅衬底之间提供热隔离。条形波导的高度受限光学模式实现了微型加热横截面。片上电阻加热器的加热效率得到提高。对在1550纳米波长下臂长为100微米的制造器件进行测量，得到的开关功率为540微瓦，10% - 90%的开关上升时间为141微秒，消光比为25分贝。
