Liu Yijin, Andrews Joy C, Wang Junyue, Meirer Florian, Zhu Peiping, Wu Ziyu, Pianetta Piero
Stanford Synchrotron Radiation Lightsource, SLAC National Accelerator Laboratory, Menlo Park, California 94025, USA.
Opt Express. 2011 Jan 17;19(2):540-5. doi: 10.1364/OE.19.000540.
An alternative method for quantitative phase retrieval in a transmission X-ray microscope system at sub-50-nm resolution is presented. As an alternative to moving the sample in the beam direction in order to analyze the propagation-introduced phase effect, we have illuminated the TXM using X-rays of different energy without any motor movement in the TXM system. Both theoretical analysis and experimental studies have confirmed the feasibility and the advantage of our method, because energy tuning can be performed with very high energy resolution using a double crystal monochromator at a synchrotron beam line, and there is zero motor error in TXM system in our approach. High-spatial-resolution phase retrieval is accomplished using the proposed method.
本文提出了一种用于透射X射线显微镜系统中50纳米以下分辨率定量相位恢复的替代方法。作为在光束方向上移动样品以分析传播引入的相位效应的替代方法,我们在TXM系统中使用不同能量的X射线照射TXM,而无需任何电机移动。理论分析和实验研究均证实了我们方法的可行性和优势,因为在同步辐射光束线上使用双晶单色仪可以以非常高的能量分辨率进行能量调谐,并且我们的方法在TXM系统中电机误差为零。使用所提出的方法实现了高空间分辨率的相位恢复。