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激光减薄 MoS₂:按需生成单层半导体。

Laser-thinning of MoS₂: on demand generation of a single-layer semiconductor.

机构信息

Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands.

出版信息

Nano Lett. 2012 Jun 13;12(6):3187-92. doi: 10.1021/nl301164v. Epub 2012 Jun 4.

Abstract

Single-layer MoS(2) is an attractive semiconducting analogue of graphene that combines high mechanical flexibility with a large direct bandgap of 1.8 eV. On the other hand, bulk MoS(2) is an indirect bandgap semiconductor similar to silicon, with a gap of 1.2 eV, and therefore deterministic preparation of single MoS(2) layers is a crucial step toward exploiting the large direct bandgap of monolayer MoS(2) in electronic, optoelectronic, and photovoltaic applications. Although mechanical and chemical exfoliation methods can be used to obtain high quality MoS(2) single layers, the lack of control in the thickness, shape, size, and position of the flakes limits their usefulness. Here we present a technique for controllably thinning multilayered MoS(2) down to a single-layer two-dimensional crystal using a laser. We generate single layers in arbitrary shapes and patterns with feature sizes down to 200 nm and show that the resulting two-dimensional crystals have optical and electronic properties comparable to that of pristine exfoliated MoS(2) single layers.

摘要

单层 MoS(2) 是石墨烯的一种极具吸引力的半导体类似物,它结合了高机械柔韧性和 1.8eV 的大直接带隙。另一方面,体相 MoS(2) 类似于硅,是一种间接带隙半导体,带隙为 1.2eV,因此,确定性地制备单层 MoS(2) 层是在电子、光电和光伏应用中利用单层 MoS(2) 大直接带隙的关键步骤。尽管机械和化学剥落方法可用于获得高质量的 MoS(2)单层,但在薄片的厚度、形状、尺寸和位置方面缺乏控制限制了它们的用途。在这里,我们提出了一种使用激光将多层 MoS(2)可控减薄至单层二维晶体的技术。我们以低至 200nm 的特征尺寸生成任意形状和图案的单层,并表明所得到的二维晶体具有与原始剥离的 MoS(2)单层相当的光学和电子性能。

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