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多层 MoS2 场效应晶体管的电应力诱导阈值电压不稳定性。

Electric stress-induced threshold voltage instability of multilayer MoS2 field effect transistors.

机构信息

Department of Physics and Astronomy, Seoul National University , Gwanak-ro, Gwanak-gu, Seoul 151-744, Korea.

出版信息

ACS Nano. 2013 Sep 24;7(9):7751-8. doi: 10.1021/nn402348r. Epub 2013 Aug 12.

Abstract

We investigated the gate bias stress effects of multilayered MoS2 field effect transistors (FETs) with a back-gated configuration. The electrical stability of the MoS2 FETs can be significantly influenced by the electrical stress type, relative sweep rate, and stress time in an ambient environment. Specifically, when a positive gate bias stress was applied to the MoS2 FET, the current of the device decreased and its threshold shifted in the positive gate bias direction. In contrast, with a negative gate bias stress, the current of the device increased and the threshold shifted in the negative gate bias direction. The gate bias stress effects were enhanced when a gate bias was applied for a longer time or when a slower sweep rate was used. These phenomena can be explained by the charge trapping due to the adsorption or desorption of oxygen and/or water on the MoS2 surface with a positive or negative gate bias, respectively, under an ambient environment. This study will be helpful in understanding the electrical-stress-induced instability of the MoS2-based electronic devices and will also give insight into the design of desirable devices for electronics applications.

摘要

我们研究了具有背栅结构的多层 MoS2 场效应晶体管 (FET) 的栅偏压应力效应。在环境中,MoS2 FET 的电稳定性会受到电应力类型、相对扫描速率和应力时间的显著影响。具体来说,当对 MoS2 FET 施加正栅偏压应力时,器件的电流减小,阈值向正栅偏压方向移动。相比之下,当施加负栅偏压应力时,器件的电流增加,阈值向负栅偏压方向移动。当栅偏压施加时间更长或使用较慢的扫描速率时,栅偏压应力效应会增强。这些现象可以通过在环境下,MoS2 表面吸附或解吸氧气和/或水分别导致正或负栅偏压下的电荷俘获来解释。这项研究有助于理解 MoS2 基电子器件电应力诱导的不稳定性,并为电子应用中理想器件的设计提供了思路。

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