1] Electronics Laboratory, Swiss Federal Institute of Technology, Zurich 8092, Switzerland [2].
Electronics Laboratory, Swiss Federal Institute of Technology, Zurich 8092, Switzerland.
Nat Commun. 2014;5:2982. doi: 10.1038/ncomms3982.
Electronics on very thin substrates have shown remarkable bendability, conformability and lightness, which are important attributes for biological tissues sensing, wearable or implantable devices. Here we propose a wafer-scale process scheme to realize ultra flexible, lightweight and transparent electronics on top of a 1-μm thick parylene film that is released from the carrier substrate after the dissolution in water of a polyvinyl- alcohol layer. The thin substrate ensures extreme flexibility, which is demonstrated by transistors that continue to work when wrapped around human hairs. In parallel, the use of amorphous oxide semiconductor and high-K dielectric enables the realization of analogue amplifiers operating at 12 V and above 1 MHz. Electronics can be transferred on any object, surface and on biological tissues like human skin and plant leaves. We foresee a potential application as smart contact lenses, covered with light, transparent and flexible devices, which could serve to monitor intraocular pressure for glaucoma disease.
在非常薄的衬底上的电子器件已经表现出显著的柔韧性、贴合性和轻便性，这些都是生物组织感应、可穿戴或可植入设备的重要属性。在这里，我们提出了一种晶圆级工艺方案，在 1 微米厚的聚对二甲苯薄膜上实现超灵活、轻便和透明的电子器件，该薄膜在聚醋酸乙烯醇层溶解在水中后从载体衬底上释放出来。薄衬底确保了极高的柔韧性，这可以通过晶体管来证明，当晶体管被包裹在人发上时，晶体管仍能继续工作。同时，非晶氧化物半导体和高介电常数的使用使得模拟放大器能够在 12V 及以上 1MHz 的频率下工作。电子器件可以转移到任何物体、表面以及像人类皮肤和植物叶片等生物组织上。我们预见到一种潜在的应用，作为智能隐形眼镜，覆盖着轻便、透明和灵活的设备，可以用来监测青光眼疾病的眼内压。
