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厚度小于180纳米的超贴合高性能碳纳米管基双栅晶体管和差分放大器。

Sub-180-nanometer-thick ultraconformable high-performance carbon nanotube-based dual-gate transistors and differential amplifiers.

作者信息

Wang Yuru, Wang Tingzhi, Xiang Li, Huang Ruyi, Long Guanhua, Wang Wanyi, Xi Meiqi, Tian Jiamin, Li Wangchang, Deng Xiaosong, Gong Qibei, Bai Tianshun, Chen Yufan, Liu Hong, Xia Yu, Liang Xuelei, Chen Qing, Peng Lian-Mao, Hu Youfan

机构信息

Key Laboratory for the Physics and Chemistry of Nanodevices, Center for Carbon-Based Electronics and School of Electronics, Peking University, Beijing 100871, China.

College of Materials Science and Engineering, Hunan University, Changsha, 410082, China.

出版信息

Sci Adv. 2024 Sep 6;10(36):eadq6022. doi: 10.1126/sciadv.adq6022.

Abstract

There is increased interest in ultrathin flexible devices with thicknesses of <1 micrometers due to excellent conformability toward advanced laminated bioelectronics. However, because of limitations in materials, device structure, and fabrication methodology, the performance of these ultrathin devices and circuits is insufficient to support higher-level applications. Here, we report high-performance carbon nanotube-based thin-film transistors (TFTs) and differential amplifiers on ultrathin polyimide films with a total thickness of <180 nanometers. A dual-gate structure is introduced to guarantee excellent gate control efficiency and mechanical stability of the ultrathin TFTs, which exhibit high transconductance (8.96 microsiemens per micrometer), high mobility (127 square centimeters per volt per second), and steep subthreshold swing (84 millivolts per decade), and can sustain a bending radius of curvature of <10 micrometers. The differential amplifier achieves the highest gain-bandwidth product (1.83 megahertz) among flexible differential amplifiers, enabling higher-gain amplification of weak signals over an extended frequency spectrum that is demonstrated by amplification of electromyography signals in situ.

摘要

由于对先进层压生物电子学具有出色的贴合性,厚度小于1微米的超薄柔性器件受到了越来越多的关注。然而,由于材料、器件结构和制造方法的限制,这些超薄器件和电路的性能不足以支持更高层次的应用。在此,我们报告了基于高性能碳纳米管的薄膜晶体管(TFT)和总厚度小于180纳米的超薄聚酰亚胺薄膜上的差分放大器。引入双栅结构以确保超薄TFT具有出色的栅极控制效率和机械稳定性,这些TFT表现出高跨导(每微米8.96微西门子)、高迁移率(每伏每秒127平方厘米)和陡峭的亚阈值摆幅(每十倍频程84毫伏),并且能够承受小于10微米的弯曲曲率半径。该差分放大器在柔性差分放大器中实现了最高的增益带宽积(1.83兆赫兹),能够在扩展频谱上对微弱信号进行更高增益的放大,这通过原位放大肌电信号得到了证明。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0a5e/11378910/b10983ef6fd7/sciadv.adq6022-f1.jpg

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