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采用两步金属辅助化学蚀刻法从冶金级硅粉制备硅纳米线填充薄膜。

Formation of silicon nanowire packed films from metallurgical-grade silicon powder using a two-step metal-assisted chemical etching method.

作者信息

Ouertani Rachid, Hamdi Abderrahmen, Amri Chohdi, Khalifa Marouan, Ezzaouia Hatem

机构信息

Laboratoire de Photovoltaïque, Centre de Recherches et des Technologies de l'Énergie, Technopôle de Borj-Cédria, BP 95, 2050 Hammam-Lif, Tunisie.

出版信息

Nanoscale Res Lett. 2014 Oct 14;9(1):574. doi: 10.1186/1556-276X-9-574. eCollection 2014.

Abstract

In this work, we use a two-step metal-assisted chemical etching method to produce films of silicon nanowires shaped in micrograins from metallurgical-grade polycrystalline silicon powder. The first step is an electroless plating process where the powder was dipped for few minutes in an aqueous solution of silver nitrite and hydrofluoric acid to permit Ag plating of the Si micrograins. During the second step, corresponding to silicon dissolution, we add a small quantity of hydrogen peroxide to the plating solution and we leave the samples to be etched for three various duration (30, 60, and 90 min). We try elucidating the mechanisms leading to the formation of silver clusters and silicon nanowires obtained at the end of the silver plating step and the silver-assisted silicon dissolution step, respectively. Scanning electron microscopy (SEM) micrographs revealed that the processed Si micrograins were covered with densely packed films of self-organized silicon nanowires. Some of these nanowires stand vertically, and some others tilt to the silicon micrograin facets. The thickness of the nanowire films increases from 0.2 to 10 μm with increasing etching time. Based on SEM characterizations, laser scattering estimations, X-ray diffraction (XRD) patterns, and Raman spectroscopy, we present a correlative study dealing with the effect of the silver-assisted etching process on the morphological and structural properties of the processed silicon nanowire films.

摘要

在这项工作中,我们采用两步金属辅助化学蚀刻法,由冶金级多晶硅粉末制备出呈微晶粒状的硅纳米线薄膜。第一步是化学镀过程,将粉末在亚硝酸银和氢氟酸的水溶液中浸泡几分钟,以使硅微晶粒镀银。在第二步(即硅溶解步骤)中,我们向镀液中加入少量过氧化氢,并将样品分别蚀刻三种不同的时长(30、60和90分钟)。我们试图阐明分别在镀银步骤和银辅助硅溶解步骤结束时导致银团簇和硅纳米线形成的机制。扫描电子显微镜(SEM)显微照片显示,处理后的硅微晶粒覆盖着自组织硅纳米线的致密堆积薄膜。其中一些纳米线垂直站立,另一些则倾斜于硅微晶粒的晶面。随着蚀刻时间的增加,纳米线薄膜的厚度从0.2μm增加到10μm。基于SEM表征、激光散射估计、X射线衍射(XRD)图谱和拉曼光谱,我们进行了一项相关研究,探讨银辅助蚀刻工艺对处理后的硅纳米线薄膜的形态和结构性能的影响。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2d4e/4209156/9bfca792d147/1556-276X-9-574-1.jpg

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