Naiman Alex, Desiatov Boris, Stern Liron, Mazurski Noa, Shappir Joseph, Levy Uriel
Opt Lett. 2015 May 1;40(9):1892-5. doi: 10.1364/OL.40.001892.
We describe a platform for the fabrication of smooth waveguides and ultrahigh-quality-factor (Q factor) silicon resonators using a modified local oxidation of silicon (LOCOS) technique. Unlike the conventional LOCOS process, our approach allows the fabrication of nearly planarized structures, supporting a multilayer silicon photonics configuration. Using this approach we demonstrate the fabrication and the characterization of a microdisk resonator with an intrinsic Q factor that is one of the highest Q factors achieved with a compact silicon-on-insulator platform.
我们描述了一种使用改进的硅局部氧化（LOCOS）技术制造平滑波导和超高品质因数（Q 因子）硅谐振器的平台。与传统的 LOCOS 工艺不同，我们的方法允许制造近乎平面化的结构，支持多层硅光子学配置。使用这种方法，我们展示了一种微盘谐振器的制造和表征，其本征 Q 因子是在紧凑的绝缘体上硅平台上实现的最高 Q 因子之一。
