Laser Thermal Lab, Department of Mechanical Engineering, University of California, Berkeley, CA, 94720, USA.
Department of Materials Science and Engineering, University of California, Berkeley, CA, 94720, USA.
Adv Mater. 2016 Jan 13;28(2):341-6. doi: 10.1002/adma.201503945. Epub 2015 Nov 16.
Laser-assisted phosphorus doping is demonstrated on ultrathin transition-metal dichalcogenides (TMDCs) including n-type MoS2 and p-type WSe2 . Temporal and spatial control of the doping is achieved by varying the laser irradiation power and time, demonstrating wide tunability and high site selectivity with high stability. The laser-assisted doping method may enable a new avenue for functionalizing TMDCs for customized nanodevice applications.
激光辅助磷掺杂在超薄过渡金属二卤代物（TMDCs）上得到了证明，包括 n 型 MoS2 和 p 型 WSe2。通过改变激光辐照功率和时间来实现掺杂的时空控制，展示了宽可调谐性和高稳定性的高选择性。激光辅助掺杂方法可能为 TMDCs 的功能化开辟新途径，以满足定制纳米器件应用的需求。
