Huo Xiaoye, Xu Jingjing, Wang Zhenhai, Yang Fan, Xu Shengyong
Key Laboratory for Physics and Chemistry of Nanodevices and Department of Electronics, Peking University, Beijing, 100871, People's Republic of China.
Nanoscale Res Lett. 2016 Dec;11(1):351. doi: 10.1186/s11671-016-1565-8. Epub 2016 Jul 28.
Dozens of small dual-beam thin-film temperature sensors with a total width down to 430 nm were fabricated and tested. The sensors were all made from 90-nm-thick Pd thin films, where the width of the narrow stripes was 70-100 nm and that of the wide ones was 210-800 nm. Two different calibration methods showed consistent and repeatable sensitivities of 0.7-1.2 μV/K for the sensors, confirming that the sensitivity mainly depended on the width configuration of each sensor. By integrating arrays of such sensors on a practical testing platform using hybrid e-beam lithography and photolithography techniques, we demonstrated that these sensors were capable of detecting a weak surface temperature difference of 0.1-0.2 K at microscale, and they could be scaled up as built-in temperature sensors in many practical devices.
制造并测试了数十个总宽度低至430纳米的小型双光束薄膜温度传感器。这些传感器均由90纳米厚的钯薄膜制成，其中窄条纹的宽度为70 - 100纳米，宽条纹的宽度为210 - 800纳米。两种不同的校准方法显示，这些传感器的灵敏度一致且可重复，为0.7 - 1.2微伏/开尔文，证实了灵敏度主要取决于每个传感器的宽度配置。通过使用混合电子束光刻和光刻技术将此类传感器阵列集成到一个实际测试平台上，我们证明了这些传感器能够在微观尺度上检测到0.1 - 0.2开尔文的微弱表面温差，并且它们可以作为内置温度传感器在许多实际设备中进行放大应用。
