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通过射频等离子体辅助氧化物分子束外延在石英玻璃衬底上生长的VO₂热致变色薄膜。

VO₂ Thermochromic Films on Quartz Glass Substrate Grown by RF-Plasma-Assisted Oxide Molecular Beam Epitaxy.

作者信息

Zhang Dong, Sun Hong-Jun, Wang Min-Huan, Miao Li-Hua, Liu Hong-Zhu, Zhang Yu-Zhi, Bian Ji-Ming

机构信息

New Energy Source Research Center, Shenyang Institute of Engineering, Shenyang 110136, China.

Key Laboratory of Materials Modification by Laser, Ion and Electron Beams(Ministry of Education), School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China.

出版信息

Materials (Basel). 2017 Mar 19;10(3):314. doi: 10.3390/ma10030314.

DOI:10.3390/ma10030314
PMID:28772673
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC5503335/
Abstract

Vanadium dioxide (VO₂) thermochromic thin films with various thicknesses were grown on quartz glass substrates by radio frequency (RF)-plasma assisted oxide molecular beam epitaxy (O-MBE). The crystal structure, morphology and chemical stoichiometry were investigated systemically by X-ray diffraction (XRD), atomic force microscopy (AFM), Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) analyses. An excellent reversible metal-to-insulator transition (MIT) characteristics accompanied by an abrupt change in both electrical resistivity and optical infrared (IR) transmittance was observed from the optimized sample. Remarkably, the transition temperature (T) deduced from the resistivity-temperature curve was reasonably consistent with that obtained from the temperature-dependent IR transmittance. Based on Raman measurement and XPS analyses, the observations were interpreted in terms of residual stresses and chemical stoichiometry. This achievement will be of great benefit for practical application of VO₂-based smart windows.

摘要

通过射频(RF)等离子体辅助氧化物分子束外延(O-MBE)在石英玻璃衬底上生长了不同厚度的二氧化钒(VO₂)热致变色薄膜。通过X射线衍射(XRD)、原子力显微镜(AFM)、拉曼光谱和X射线光电子能谱(XPS)分析系统地研究了晶体结构、形貌和化学计量比。从优化后的样品中观察到了优异的可逆金属-绝缘体转变(MIT)特性,同时伴随着电阻率和光学红外(IR)透射率的突然变化。值得注意的是,从电阻率-温度曲线推导出的转变温度(T)与从温度依赖的IR透射率获得的转变温度合理地一致。基于拉曼测量和XPS分析,从残余应力和化学计量比的角度对这些观察结果进行了解释。这一成果将对基于VO₂的智能窗户的实际应用大有裨益。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/be8d5727b075/materials-10-00314-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/8e71b732d216/materials-10-00314-g001.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/7a41df292e32/materials-10-00314-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/f54f72067c1b/materials-10-00314-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/6735a42c1b60/materials-10-00314-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/be8d5727b075/materials-10-00314-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/8e71b732d216/materials-10-00314-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/9c8d2d25d361/materials-10-00314-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/7a41df292e32/materials-10-00314-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/f54f72067c1b/materials-10-00314-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/6735a42c1b60/materials-10-00314-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/3d2d/5503335/be8d5727b075/materials-10-00314-g006.jpg

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