Lee Ke-Jing, Wang Li-Wen, Chiang Te-Kung, Wang Yeong-Her
Department of Electrical Engineering, Institute of Microelectronics, Advanced Optoelectronic Technology Center, National Cheng-Kung University, Tainan 701, Taiwan.
Department of Electrical Engineering, National University of Kaohsiung, Kaohsiung 811, Taiwan.
Materials (Basel). 2015 Oct 26;8(10):7191-7198. doi: 10.3390/ma8105374.
Strontium titanate nickelate (STN) thin films on indium tin oxide (ITO)/glass substrate were synthesized using the sol-gel method for resistive random access memory (RRAM) applications. Aluminum (Al), titanium (Ti), tungsten (W), gold (Au) and platinum (Pt) were used as top electrodes in the STN-based RRAM to probe the switching behavior. The bipolar resistive switching behavior of the set and reset voltages is in opposite bias in the Al/STN/ITO and Pt/STN/ITO RRAMs, which can be partly ascribed to the different work functions of top electrodes in the ITO. Analyses of the fitting results and temperature-dependent performances showed that the Al/STN/ITO switching was mainly attributed to the absorption/release of oxygen-based functional groups, whereas the Pt/STN/ITO switching can be associated with the diffusion of metal electrode ions. The Al/STN/ITO RRAM demonstrated a high resistance ratio of >10⁶ between the high-resistance state (HRS) and the low-resistance state (LRS), as well as a retention ability of >10⁵ s. Furthermore, the Pt/STN/ITO RRAM displayed a HRS/LRS resistance ratio of >10³ and a retention ability of >10⁵ s.
采用溶胶-凝胶法在氧化铟锡(ITO)/玻璃衬底上合成了钛酸锶镍(STN)薄膜,用于电阻式随机存取存储器(RRAM)应用。铝(Al)、钛(Ti)、钨(W)、金(Au)和铂(Pt)被用作基于STN的RRAM中的顶电极,以探究其开关行为。在Al/STN/ITO和Pt/STN/ITO RRAM中,设置和重置电压的双极电阻开关行为处于相反的偏压下,这部分可归因于ITO中顶电极的不同功函数。对拟合结果和温度相关性能的分析表明,Al/STN/ITO开关主要归因于基于氧的官能团的吸收/释放,而Pt/STN/ITO开关可能与金属电极离子的扩散有关。Al/STN/ITO RRAM在高电阻状态(HRS)和低电阻状态(LRS)之间表现出大于10⁶的高电阻比,以及大于10⁵ s的保持能力。此外,Pt/STN/ITO RRAM显示出大于10³的HRS/LRS电阻比和大于10⁵ s的保持能力。