Jibril Liban, Ramírez Julián, Zaretski Aliaksandr V, Lipomi Darren J
Department of NanoEngineering, University of California, San Diego, 9500 Gilman Drive, Mail Code 0448, La Jolla, CA 92093-0448.
Sens Actuators A Phys. 2017 Aug 15;263:702-706. doi: 10.1016/j.sna.2017.07.046. Epub 2017 Jul 24.
This article describes the fabrication of single-nanowire strain sensors by thin sectioning of gold films with an ultramicrotome-i.e., "nanoskiving." The nanowire sensors are transferred to various substrates from the water bath on which they float after sectioning. The electrical response of these single nanowires to mechanical strain is investigated, with the lowest detectable strain determined to be 1.6 × 10 with a repeatable response to strains as high as 7 × 10. The sensors are shown to have an enhanced sensitivity with a gauge factor of 3.1 on average, but as high as 9.5 in the low strain regime (ε ~ 1 × 10). Conventional thin films of gold of the same height as the nanowires are used as controls, and are unable to detect those same strains. The practicality of this sensor is investigated by transferring a single nanowire to polyimide tape, and placing the sensor on the wrist to monitor the pulse pressure waveform from the radial artery. The nanowires are fabricated with simple tools and require no lithography. Moreover, the sensors can be "manufactured" efficiently, as each consecutive section of the film is a quasi copy of the previous nanowire. The simple fabrication of these nanowires, along with the compatibility with flexible substrates, offers possibilities in developing new kinds of devices for biomedical applications and structural health monitoring.
本文介绍了通过用超薄切片机对金膜进行薄切片(即“纳米切片”)来制造单纳米线应变传感器的方法。纳米线传感器在切片后从其漂浮的水浴转移到各种基板上。研究了这些单纳米线对机械应变的电响应,确定最低可检测应变为1.6×10,对高达7×10的应变具有可重复响应。结果表明,这些传感器具有增强的灵敏度,平均应变片系数为3.1,但在低应变范围(ε~1×10)高达9.5。使用与纳米线高度相同的传统金薄膜作为对照,它们无法检测到相同的应变。通过将单根纳米线转移到聚酰亚胺带上,并将传感器放在手腕上以监测桡动脉的脉压波形,研究了该传感器的实用性。纳米线用简单工具制造,无需光刻。此外,传感器可以高效“制造”,因为薄膜的每个连续切片都是前一个纳米线的近似复制品。这些纳米线的简单制造以及与柔性基板的兼容性,为开发用于生物医学应用和结构健康监测的新型器件提供了可能性。