Bie Ya-Qing, Grosso Gabriele, Heuck Mikkel, Furchi Marco M, Cao Yuan, Zheng Jiabao, Bunandar Darius, Navarro-Moratalla Efren, Zhou Lin, Efetov Dmitri K, Taniguchi Takashi, Watanabe Kenji, Kong Jing, Englund Dirk, Jarillo-Herrero Pablo
Department of Physics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
Nat Nanotechnol. 2017 Dec;12(12):1124-1129. doi: 10.1038/nnano.2017.209. Epub 2017 Oct 23.
One of the current challenges in photonics is developing high-speed, power-efficient, chip-integrated optical communications devices to address the interconnects bottleneck in high-speed computing systems. Silicon photonics has emerged as a leading architecture, in part because of the promise that many components, such as waveguides, couplers, interferometers and modulators, could be directly integrated on silicon-based processors. However, light sources and photodetectors present ongoing challenges. Common approaches for light sources include one or few off-chip or wafer-bonded lasers based on III-V materials, but recent system architecture studies show advantages for the use of many directly modulated light sources positioned at the transmitter location. The most advanced photodetectors in the silicon photonic process are based on germanium, but this requires additional germanium growth, which increases the system cost. The emerging two-dimensional transition-metal dichalcogenides (TMDs) offer a path for optical interconnect components that can be integrated with silicon photonics and complementary metal-oxide-semiconductors (CMOS) processing by back-end-of-the-line steps. Here, we demonstrate a silicon waveguide-integrated light source and photodetector based on a p-n junction of bilayer MoTe, a TMD semiconductor with an infrared bandgap. This state-of-the-art fabrication technology provides new opportunities for integrated optoelectronic systems.
光子学当前面临的挑战之一是开发高速、高能效、芯片集成的光通信设备,以解决高速计算系统中的互连瓶颈问题。硅光子学已成为一种领先的架构,部分原因在于有望将许多组件,如波导、耦合器、干涉仪和调制器,直接集成在基于硅的处理器上。然而,光源和光电探测器仍然存在挑战。常见的光源方法包括基于III-V族材料的一个或几个片外或晶圆键合激光器,但最近的系统架构研究表明,在发射机位置使用多个直接调制光源具有优势。硅光子工艺中最先进的光电探测器基于锗,但这需要额外生长锗,从而增加了系统成本。新兴的二维过渡金属二硫属化物(TMD)为光互连组件提供了一条途径,这些组件可以通过后端工艺步骤与硅光子学和互补金属氧化物半导体(CMOS)工艺集成。在此,我们展示了一种基于双层MoTe(一种具有红外带隙的TMD半导体)的p-n结的硅波导集成光源和光电探测器。这种先进的制造技术为集成光电子系统提供了新的机遇。