互连大气腐蚀的微波监测
Microwave Monitoring of Atmospheric Corrosion of Interconnects.
作者信息
Amoah Papa K, Veksler Dmitry, Sunday Christopher E, Moreau Stéphane, Bouchu David, Obeng Yaw S
机构信息
Engineering Physics Division, Physical Measurement Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
CEA-LETI, MINATEC Campus, F-38054 Grenoble, France.
出版信息
ECS J Solid State Sci Technol. 2018;7. doi: 10.1149/2.0181812jss.
Abstract
Traditional metrology has been unable to adequately address the reliability needs of emerging integrated circuits at the nano scale; thus, new metrology and techniques are needed. In this paper, we use microwave propagation characteristics (insertion loss and dispersion) to study the atmospheric interconnect corrosion under accelerated stress conditions. The results presented in this work indicate that the corrosion resilience of the test device is limited by the thermal aging of the passivation layer.
摘要
传统计量学已无法充分满足纳米尺度下新兴集成电路的可靠性需求；因此，需要新的计量学和技术。在本文中，我们利用微波传播特性（插入损耗和色散）来研究加速应力条件下的大气互连腐蚀。这项工作中呈现的结果表明，测试器件的耐腐蚀能力受钝化层热老化的限制。
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