Université Grenoble Alpes, CEA, LETI, 38000, Grenoble, France.
Université Grenoble Alpes, CNRS, Grenoble INP, TIMA, 38000, Grenoble, France.
Nat Commun. 2020 Jul 29;11(1):3781. doi: 10.1038/s41467-020-17592-9.
Nanomechanical mass spectrometry has proven to be well suited for the analysis of high mass species such as viruses. Still, the use of one-dimensional devices such as vibrating beams forces a trade-off between analysis time and mass resolution. Complex readout schemes are also required to simultaneously monitor multiple resonance modes, which degrades resolution. These issues restrict nanomechanical MS to specific species. We demonstrate here single-particle mass spectrometry with nano-optomechanical resonators fabricated with a Very Large Scale Integration process. The unique motion sensitivity of optomechanics allows designs that are impervious to particle position, stiffness or shape, opening the way to the analysis of large aspect ratio biological objects of great significance such as viruses with a tail or fibrils. Compared to top-down beam resonators with electrical read-out and state-of-the-art mass resolution, we show a three-fold improvement in capture area with no resolution degradation, despite the use of a single resonance mode.
纳米机械质谱已被证明非常适合分析诸如病毒等高质量的物种。尽管如此，使用诸如振动梁之类的一维器件会在分析时间和质量分辨率之间产生权衡。为了同时监测多个共振模式，还需要复杂的读出方案，这会降低分辨率。这些问题限制了纳米机械 MS 只能用于特定的物种。我们在这里展示了使用非常大规模集成电路工艺制造的纳米光学机械谐振器进行的单颗粒质谱分析。光学机械的独特运动灵敏度允许设计不受粒子位置、硬度或形状的影响，为分析具有长尾或原纤维等大纵横比的重要生物物体（如病毒）开辟了道路。与采用电读取和最先进的质量分辨率的自上而下的梁谐振器相比，尽管只使用了单个共振模式，但我们在不降低分辨率的情况下将捕获面积提高了三倍。
