Zhang Jincan, Sun Luzhao, Jia Kaicheng, Liu Xiaoting, Cheng Ting, Peng Hailin, Lin Li, Liu Zhongfan
Center for Nanochemistry, Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, People's Republic of China.
Beijing Graphene Institute (BGI), Beijing 100095, People's Republic of China.
ACS Nano. 2020 Sep 22;14(9):10796-10803. doi: 10.1021/acsnano.0c06141. Epub 2020 Aug 25.
The last 10 years have witnessed significant progress in chemical vapor deposition (CVD) growth of graphene films. However, major hurdles remain in achieving the excellent quality and scalability of CVD graphene needed for industrial production and applications. Early efforts were mainly focused on increasing the single-crystalline domain size, large-area uniformity, growth rate, and controllability of layer thickness and on decreasing the defect concentrations. An important recent advance was the discovery of the inevitable contamination phenomenon of CVD graphene film during high-temperature growth processes and the superclean growth technique, which is closely related to the surface defects and to the peeling-off and transfer quality. Superclean graphene represents a new frontier in CVD graphene research. In this Perspective, we aim to provide comprehensive understanding of the intrinsic growth contamination and the experimental solution of making superclean graphene and to provide an outlook for future commercial production of high-quality CVD graphene films.
过去十年见证了石墨烯薄膜化学气相沉积(CVD)生长方面的重大进展。然而,要实现工业生产和应用所需的高质量、可扩展的CVD石墨烯,仍存在主要障碍。早期的努力主要集中在增加单晶畴尺寸、大面积均匀性、生长速率以及层厚的可控性,同时降低缺陷浓度。最近一项重要进展是发现了CVD石墨烯薄膜在高温生长过程中不可避免的污染现象以及超净生长技术,这与表面缺陷以及剥离和转移质量密切相关。超净石墨烯代表了CVD石墨烯研究的一个新前沿。在这篇展望文章中,我们旨在全面理解内在生长污染以及制备超净石墨烯的实验解决方案,并为高质量CVD石墨烯薄膜的未来商业生产提供展望。