Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, Beijing National Laboratory for Molecular Sciences (BNLMS), College of Chemistry and Molecular Engineering, Peking University, Beijing, 100871, China.
Beijing Graphene Institute (BGI), Beijing, 100094, China.
Adv Mater. 2019 Mar;31(9):e1800996. doi: 10.1002/adma.201800996. Epub 2018 Sep 16.
Chemical vapor deposition (CVD) is considered to be an efficient method for fabricating large-area and high-quality graphene films due to its excellent controllability and scalability. Great efforts have been made to control the growth of graphene to achieve large domain sizes, uniform layers, fast growth, and low synthesis temperatures. Some attempts have been made by both the scientific community and startup companies to mass produce graphene films; however, there is a large difference in the quality of graphene synthesized on a laboratory scale and an industrial scale. Here, recent progress toward the mass production of CVD graphene films is summarized, including the manufacturing process, equipment, and critical process parameters. Moreover, the large-scale homogeneity of graphene films and fast characterization methods are also discussed, which are crucial for quality control in mass production.
化学气相沉积(CVD)被认为是一种高效的方法来制造大面积和高质量的石墨烯薄膜,因为它具有优异的可控性和可扩展性。人们已经做出了巨大的努力来控制石墨烯的生长,以实现大的畴尺寸、均匀的层、快速的生长和低的合成温度。科学界和初创公司都试图大规模生产石墨烯薄膜,但实验室规模和工业规模合成的石墨烯质量有很大的差异。在这里,总结了 CVD 石墨烯薄膜大规模生产的最新进展,包括制造工艺、设备和关键工艺参数。此外,还讨论了石墨烯薄膜的大规模均匀性和快速表征方法,这对于大规模生产中的质量控制至关重要。