Mauthe Svenja, Baumgartner Yannick, Sousa Marilyne, Ding Qian, Rossell Marta D, Schenk Andreas, Czornomaz Lukas, Moselund Kirsten E
IBM Research Europe, Säumerstr. 4, 8803, Rüschlikon, Switzerland.
Department of Information Technology and Electrical Engineering, Integrated Systems Laboratory, ETH Zurich, Gloriastr. 35, 8092, Zurich, Switzerland.
Nat Commun. 2020 Sep 11;11(1):4565. doi: 10.1038/s41467-020-18374-z.
Direct epitaxial growth of III-Vs on silicon for optical emitters and detectors is an elusive goal. Nanowires enable the local integration of high-quality III-V material, but advanced devices are hampered by their high-aspect ratio vertical geometry. Here, we demonstrate the in-plane monolithic integration of an InGaAs nanostructure p-i-n photodetector on Si. Using free space coupling, photodetectors demonstrate a spectral response from 1200-1700 nm. The 60 nm thin devices, with footprints as low as ~0.06 μm, provide an ultra-low capacitance which is key for high-speed operation. We demonstrate high-speed optical data reception with a nanostructure photodetector at 32 Gb s, enabled by a 3 dB bandwidth exceeding ~25 GHz. When operated as light emitting diode, the p-i-n devices emit around 1600 nm, paving the way for future fully integrated optical links.
在硅上直接外延生长用于光发射器和探测器的III-V族化合物是一个难以实现的目标。纳米线能够实现高质量III-V族材料的局部集成,但先进器件因其高纵横比的垂直几何结构而受到阻碍。在此,我们展示了在硅上进行InGaAs纳米结构p-i-n光电探测器的面内单片集成。利用自由空间耦合,光电探测器展现出1200 - 1700纳米的光谱响应。这些60纳米厚的器件,其占地面积低至约0.06微米,具有超低电容,这是高速运行的关键。我们展示了纳米结构光电探测器在32 Gb/s下的高速光数据接收能力,这得益于超过约25 GHz的3 dB带宽。当用作发光二极管时,p-i-n器件发射波长约为1600纳米的光,为未来的全集成光链路铺平了道路。