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高速III-V族纳米线光电探测器单片集成于硅基上。

High-speed III-V nanowire photodetector monolithically integrated on Si.

作者信息

Mauthe Svenja, Baumgartner Yannick, Sousa Marilyne, Ding Qian, Rossell Marta D, Schenk Andreas, Czornomaz Lukas, Moselund Kirsten E

机构信息

IBM Research Europe, Säumerstr. 4, 8803, Rüschlikon, Switzerland.

Department of Information Technology and Electrical Engineering, Integrated Systems Laboratory, ETH Zurich, Gloriastr. 35, 8092, Zurich, Switzerland.

出版信息

Nat Commun. 2020 Sep 11;11(1):4565. doi: 10.1038/s41467-020-18374-z.

Abstract

Direct epitaxial growth of III-Vs on silicon for optical emitters and detectors is an elusive goal. Nanowires enable the local integration of high-quality III-V material, but advanced devices are hampered by their high-aspect ratio vertical geometry. Here, we demonstrate the in-plane monolithic integration of an InGaAs nanostructure p-i-n photodetector on Si. Using free space coupling, photodetectors demonstrate a spectral response from 1200-1700 nm. The 60 nm thin devices, with footprints as low as ~0.06 μm, provide an ultra-low capacitance which is key for high-speed operation. We demonstrate high-speed optical data reception with a nanostructure photodetector at 32 Gb s, enabled by a 3 dB bandwidth exceeding ~25 GHz. When operated as light emitting diode, the p-i-n devices emit around 1600 nm, paving the way for future fully integrated optical links.

摘要

在硅上直接外延生长用于光发射器和探测器的III-V族化合物是一个难以实现的目标。纳米线能够实现高质量III-V族材料的局部集成,但先进器件因其高纵横比的垂直几何结构而受到阻碍。在此,我们展示了在硅上进行InGaAs纳米结构p-i-n光电探测器的面内单片集成。利用自由空间耦合,光电探测器展现出1200 - 1700纳米的光谱响应。这些60纳米厚的器件,其占地面积低至约0.06微米,具有超低电容,这是高速运行的关键。我们展示了纳米结构光电探测器在32 Gb/s下的高速光数据接收能力,这得益于超过约25 GHz的3 dB带宽。当用作发光二极管时,p-i-n器件发射波长约为1600纳米的光,为未来的全集成光链路铺平了道路。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/501a/7486389/459fd8ed8a2e/41467_2020_18374_Fig5_HTML.jpg

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