金属辅助化学蚀刻微纳加工特刊社论
Editorial for the Special Issue on Micro- and Nano-Fabrication by Metal Assisted Chemical Etching.
作者信息
Romano Lucia
机构信息
Institute for Biomedical Engineering, University and ETH Zürich, CH-8092 Zürich, Switzerland.
Paul Scherrer Institut, Forschungsstrasse 111, CH-5232 Villigen, Switzerland.
出版信息
Micromachines (Basel). 2020 Oct 31;11(11):988. doi: 10.3390/mi11110988.
Abstract
Discovered by Li and Bohn in 2000 [1], Metal Assisted Chemical Etching has been finally recognized as an emerging etching technology.[...].
摘要
金属辅助化学蚀刻由李和博恩于2000年发现[1]，最终被公认为一种新兴的蚀刻技术。[……]
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