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本文引用的文献

1
Curved Structure of Si by Improving Etching Direction Controllability in Magnetically Guided Metal-Assisted Chemical Etching.通过提高磁控金属辅助化学蚀刻中蚀刻方向的可控性实现硅的弯曲结构
Micromachines (Basel). 2020 Jul 30;11(8):744. doi: 10.3390/mi11080744.
2
Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review.金属辅助化学蚀刻法制备X射线光学元件综述
Micromachines (Basel). 2020 Jun 12;11(6):589. doi: 10.3390/mi11060589.
3
Black GaAs: Gold-Assisted Chemical Etching for Light Trapping and Photon Recycling.黑色砷化镓：用于光捕获和光子回收的金辅助化学蚀刻
Micromachines (Basel). 2020 Jun 5;11(6):573. doi: 10.3390/mi11060573.
4
Silicon Conical Structures by Metal Assisted Chemical Etching.通过金属辅助化学蚀刻制备硅锥形结构
Micromachines (Basel). 2020 Apr 11;11(4):402. doi: 10.3390/mi11040402.
5
Fabrication of Ultra-High Aspect Ratio (>420:1) AlO Nanotube Arraysby Sidewall TransferMetal Assistant Chemical Etching.通过侧壁转移金属辅助化学蚀刻制备超高纵横比（>420:1）的氧化铝纳米管阵列
Micromachines (Basel). 2020 Apr 3;11(4):378. doi: 10.3390/mi11040378.
6
Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates.用于制造硬X射线钯/硅波带片的金属辅助化学蚀刻和化学镀
Micromachines (Basel). 2020 Mar 13;11(3):301. doi: 10.3390/mi11030301.
7
Investigation of the Pd Nanoparticles-Assisted Chemical Etching of Silicon for Ethanol Solution Electrooxidation.用于乙醇溶液电氧化的钯纳米粒子辅助硅化学蚀刻的研究。
Micromachines (Basel). 2019 Dec 12;10(12):872. doi: 10.3390/mi10120872.

金属辅助化学蚀刻微纳加工特刊社论

Editorial for the Special Issue on Micro- and Nano-Fabrication by Metal Assisted Chemical Etching.

作者信息

Romano Lucia

机构信息

Institute for Biomedical Engineering, University and ETH Zürich, CH-8092 Zürich, Switzerland.

Paul Scherrer Institut, Forschungsstrasse 111, CH-5232 Villigen, Switzerland.

出版信息

Micromachines (Basel). 2020 Oct 31;11(11):988. doi: 10.3390/mi11110988.

DOI:10.3390/mi11110988
PMID:33142913
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7693984/
Abstract

Discovered by Li and Bohn in 2000 [1], Metal Assisted Chemical Etching has been finally recognized as an emerging etching technology.[...].

摘要

金属辅助化学蚀刻由李和博恩于2000年发现[1]，最终被公认为一种新兴的蚀刻技术。[……]