Kejík Lukáš, Horák Michal, Šikola Tomáš, Křápek Vlastimil
Opt Express. 2020 Nov 9;28(23):34960-34972. doi: 10.1364/OE.409428.
The quality of lithographically prepared structures is intimately related to the properties of the metal film from which they are fabricated. Here we compare two kinds of thin gold films on a silicon nitride membrane: a conventional polycrystalline thin film deposited by magnetron sputtering and monocrystalline gold microplates that were chemically synthesised directly on the membrane's surface for the first time. Both pristine metals were used to fabricate plasmonic nanorods using focused ion beam lithography. The structural and optical properties of the nanorods were characterized by analytical transmission electron microscopy including electron energy loss spectroscopy. The dimensions of the nanorods in both substrates reproduced well the designed size of 240×80 with the deviations up to 20 nm in both length and width. The shape reproducibility was considerably improved among monocrystalline nanorods fabricated from the same microplate. Interestingly, monocrystalline nanorods featured inclined boundaries while the boundaries of the polycrystalline nanorods were upright. Q factors and peak loss probabilities of the modes in both structures are within the experimental uncertainty identical. We demonstrate that the optical response of the plasmonic nanorods is not deteriorated when the polycrystalline metal is used instead of the monocrystalline metal.
光刻制备结构的质量与制造它们所用金属膜的性质密切相关。在此,我们比较了氮化硅膜上的两种金薄膜:一种是通过磁控溅射沉积的传统多晶薄膜,另一种是首次直接在膜表面化学合成的单晶金微板。两种原始金属都用于通过聚焦离子束光刻制造等离子体纳米棒。纳米棒的结构和光学性质通过包括电子能量损失谱在内的分析透射电子显微镜进行表征。两种衬底上纳米棒的尺寸都很好地再现了设计尺寸240×80,长度和宽度的偏差高达20纳米。由同一微板制造的单晶纳米棒之间的形状再现性有了显著提高。有趣的是,单晶纳米棒具有倾斜边界,而多晶纳米棒的边界是直立的。两种结构中模式的品质因数和峰值损耗概率在实验不确定度范围内相同。我们证明,当使用多晶金属代替单晶金属时,等离子体纳米棒的光学响应不会变差。