†School of Chemical Engineering, The University of Adelaide, Adelaide, SA 5005, Australia.
‡Discipline of Surgery, Basil Hetzel Institute, The University of Adelaide, Adelaide, SA 5005, Australia.
ACS Appl Mater Interfaces. 2015 May 13;7(18):9879-88. doi: 10.1021/acsami.5b01885. Epub 2015 May 1.
Structural engineering of porous anodic aluminum oxide (AAO) nanostructures by anodization has been extensively studied in the past two decades. However, the transition of this technique into the fabrication of AAO-based one-dimensional photonic crystal is still challenging. Herein, we report for the first time on the fabrication of AAO optical microcavities by a rationally designed anodization approach. In our study, two feasible methods are used to fabricate microcavities with tunable resonance peak across the visible and near-infrared spectra. Distributed Bragg reflector (DBR) nanostructures are first fabricated by pulse anodization approach, in which the anodization voltage was periodically manipulated to achieve pseudosinusoidal modulation of the effective refractive index gradient along the depth of the AAO nanostructures. Microcavities were created by creating a nanoporous layer of constant porosity between two AAO-DBR nanostructures, and by introducing a shift of the phase of the porosity gradient along the depth of AAO. The position of the resonance peak in these microcavities can be linearly tuned by means of the duration of the high voltage anodization. These optical nanostructures are sensitive to alterations of the effective media inside the nanopores. The AAO microcavity shows a central wavelength shift of 2.58 ± 0.37 nm when exposed to water vapor. Our research highlights the feasibility of anodization technique to fabricate AAO-based photonic nanostructures for advanced sensing applications.
在过去的二十年中,通过阳极氧化对多孔阳极氧化铝(AAO)纳米结构进行结构工程已经得到了广泛的研究。然而,将该技术转化为制造基于 AAO 的一维光子晶体仍然具有挑战性。在此,我们首次报道了通过合理设计的阳极氧化方法制造 AAO 光学微腔。在我们的研究中,使用了两种可行的方法来制造在可见和近红外光谱范围内具有可调谐共振峰的微腔。通过脉冲阳极氧化方法首先制造分布式布拉格反射器(DBR)纳米结构,其中周期性地操纵阳极氧化电压以实现 AAO 纳米结构深度上有效折射率梯度的伪正弦调制。通过在两个 AAO-DBR 纳米结构之间创建具有恒定孔隙率的纳米多孔层,并通过在 AAO 深度上引入孔隙率梯度的相位偏移来创建微腔。通过高压阳极氧化的持续时间可以线性地调节这些微腔中的共振峰的位置。这些光学纳米结构对纳米孔内有效介质的变化敏感。AAO 微腔在暴露于水蒸气时显示出 2.58 ± 0.37nm 的中心波长偏移。我们的研究强调了阳极氧化技术制造基于 AAO 的光子纳米结构用于先进传感应用的可行性。