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低温溅射氧化铟锡在太阳能光伏技术中的作用。

Roles of Low Temperature Sputtered Indium Tin Oxide for Solar Photovoltaic Technology.

作者信息

Fernández Susana, González José Pablo, Grandal Javier, Braña Alejandro F, Gómez-Mancebo María Belén, Gandía José Javier

机构信息

Departamento de Energía, Centro de Investigaciones Energéticas, Medioambientales y Tecnológicas (CIEMAT), Avenida Complutense 40, 28040 Madrid, Spain.

Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM), Departamento de Electrónica Física, Universidad Politécnica de Madrid, Avenida Complutense 30, 28040 Madrid, Spain.

出版信息

Materials (Basel). 2021 Dec 15;14(24):7758. doi: 10.3390/ma14247758.

Abstract

Different functionalities of materials based on indium tin oxide and fabricated at soft conditions were investigated with the goal of being used in a next generation of solar photovoltaic devices. These thin films were fabricated in a commercial UNIVEX 450B magnetron sputtering. The first studied functionality consisted of an effective n-type doped layer in an n-p heterojunction based on p-type crystalline silicon. At this point, the impact of the ITO film thickness (varied from 45 to 140 nm) and the substrate temperature (varied from room temperature to 250 °C) on the heterojunction parameters was evaluated separately. To avoid possible damages in the heterojunction interface, the applied ITO power was purposely set as low as 25 W; and to minimize the energy consumption, no heat treatment process was used. The second functionality consisted of indium-saving transparent conductive multicomponent materials for full spectrum applications. This was carried out by the doping of the ITO matrix with transition metals, as titanium and zinc. This action can reduce the production cost without sacrificing the optoelectronic film properties. The morphology, chemical, structural nature and optoelectronic properties were evaluated as function of the doping concentrations. The results revealed low manufactured and suitable films used successfully as conventional emitter, and near-infrared extended transparent conductive materials with superior performance that conventional ones, useful for full spectrum applications. Both can open interesting choices for cost-effective photovoltaic technologies.

摘要

研究了基于氧化铟锡且在温和条件下制备的材料的不同功能,目标是将其应用于下一代太阳能光伏器件。这些薄膜是在商用UNIVEX 450B磁控溅射设备中制备的。首先研究的功能是在基于p型晶体硅的n-p异质结中形成有效的n型掺杂层。此时,分别评估了ITO薄膜厚度(从45纳米变化到140纳米)和衬底温度(从室温变化到250℃)对异质结参数的影响。为避免异质结界面可能出现的损伤,特意将施加的ITO功率设置为低至25瓦;并且为了使能耗最小化,未使用热处理工艺。第二个功能是用于全光谱应用的节省铟的透明导电多组分材料。这是通过用过渡金属(如钛和锌)掺杂ITO基体来实现的。这一举措可以在不牺牲光电薄膜性能的情况下降低生产成本。根据掺杂浓度评估了其形态、化学、结构性质和光电性能。结果表明,成功制备出了可作为传统发射极使用的低制造成本且合适的薄膜,以及具有优于传统材料的性能、适用于全光谱应用的近红外扩展透明导电材料。两者都为具有成本效益的光伏技术提供了有趣的选择。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b43d/8707650/c791c29c31e4/materials-14-07758-g001.jpg

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