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在硅衬底上外延生长的中红外III-V族半导体激光器。

Mid-infrared III-V semiconductor lasers epitaxially grown on Si substrates.

作者信息

Tournié Eric, Monge Bartolome Laura, Rio Calvo Marta, Loghmari Zeineb, Díaz-Thomas Daniel A, Teissier Roland, Baranov Alexei N, Cerutti Laurent, Rodriguez Jean-Baptiste

机构信息

IES, University of Montpellier, CNRS, 34000, Montpellier, France.

出版信息

Light Sci Appl. 2022 Jun 1;11(1):165. doi: 10.1038/s41377-022-00850-4.

Abstract

There is currently much activity toward the integration of mid-infrared semiconductor lasers on Si substrates for developing a variety of smart, compact, sensors based on Si-photonics integrated circuits. We review this rapidly-evolving research field, focusing on the epitaxial integration of antimonide lasers, the only technology covering the whole mid-to-far-infrared spectral range. We explain how a dedicated molecular-beam epitaxy strategy allows for achieving high-performance GaSb-based diode lasers, InAs/AlSb quantum cascade lasers, and InAs/GaInSb interband cascade lasers by direct growth on on-axis (001)Si substrates, whereas GaAs-on-Si or GaSb-on-Si layers grown by metal-organic vapor phase epitaxy in large capability epitaxy tools are suitable templates for antimonide laser overgrowth. We also show that etching the facets of antimonide lasers grown on Si is a viable approach in view of photonic integrated circuits. Remarkably, this review shows that while diode lasers are sensitive to residual crystal defects, the quantum cascade and interband cascade lasers grown on Si exhibit performances comparable to those of similar devices grown on their native substrates, due to their particular band structures and radiative recombination channels. Long device lifetimes have been extrapolated for interband cascade lasers. Finally, routes to be further explored are also presented.

摘要

目前,人们正积极致力于将中红外半导体激光器集成到硅衬底上,以开发各种基于硅光子集成电路的智能、紧凑传感器。我们回顾了这个快速发展的研究领域,重点关注锑化物激光器的外延集成,这是唯一覆盖整个中红外到远红外光谱范围的技术。我们解释了一种专门的分子束外延策略如何通过在轴向(001)硅衬底上直接生长来实现高性能的基于GaSb的二极管激光器、InAs/AlSb量子级联激光器和InAs/GaInSb带间级联激光器,而在大容量外延工具中通过金属有机气相外延生长的Si上的GaAs或Si上的GaSb层是锑化物激光器过生长的合适模板。我们还表明,考虑到光子集成电路,蚀刻在硅上生长的锑化物激光器的刻面是一种可行的方法。值得注意的是,这篇综述表明,虽然二极管激光器对残余晶体缺陷敏感,但由于其特殊的能带结构和辐射复合通道,在硅上生长的量子级联激光器和带间级联激光器的性能与在其原生衬底上生长的类似器件相当。已推断出带间级联激光器具有较长的器件寿命。最后,还介绍了有待进一步探索的途径。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/84f9/9160057/a62904e468b0/41377_2022_850_Fig1_HTML.jpg

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