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用于制备NiO薄膜的Ni(OH)前驱体的滴干沉积法

Drop-Dry Deposition of Ni(OH) Precursors for Fabrication of NiO Thin Films.

作者信息

Li Tong, Okada Tetsuya, Ichimura Masaya

机构信息

Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology, Gokiso, Showa, Nagoya 466-8555, Japan.

出版信息

Materials (Basel). 2022 Jun 27;15(13):4513. doi: 10.3390/ma15134513.

Abstract

Drop-dry deposition (DDD) is a method of depositing thin films by heating and drying the deposition solution dropped on a substrate. We prepared Ni(OH) precursor thin films by DDD and annealed them in air to prepare NiO thin films. The appropriate deposition conditions were found by changing the number of drop-dry cycles and the concentrations of chemicals in the solution, and the Ni(OH) precursor film with a thickness of 0.3 μm and optical transmittance of more than 95% was successfully deposited. Raman and X-ray diffraction measurements were performed, and it was found that the NiO film was successfully fabricated after annealing at 400 °C. The p-type conductivity of the annealed film was confirmed by photoelectrochemical measurements. In addition, we prepared n-type ZnO by electrochemical deposition on NiO thin films. The current-voltage measurement results show that the ZnO/NiO heterojunction had rectification properties.

摘要

滴干沉积(DDD)是一种通过加热和干燥滴落在基板上的沉积溶液来沉积薄膜的方法。我们通过DDD制备了Ni(OH)前驱体薄膜,并在空气中对其进行退火以制备NiO薄膜。通过改变滴干循环次数和溶液中化学物质的浓度找到了合适的沉积条件,并成功沉积了厚度为0.3μm且光学透过率超过95%的Ni(OH)前驱体薄膜。进行了拉曼和X射线衍射测量,发现NiO薄膜在400℃退火后成功制备。通过光电化学测量证实了退火薄膜的p型导电性。此外,我们通过电化学沉积在NiO薄膜上制备了n型ZnO。电流-电压测量结果表明,ZnO/NiO异质结具有整流特性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6145/9267586/f3f5eed27983/materials-15-04513-g001.jpg

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