Ouyang Zhuping, Wang Wanxia, Dai Mingjiang, Zhang Baicheng, Gong Jianhong, Li Mingchen, Qin Lihao, Sun Hui
School of Space Science and Physics, Shandong University, Weihai 264209, China.
School of Mechanical, Electrical and Information Engineering, Shandong University, Weihai 264200, China.
Materials (Basel). 2022 Jul 8;15(14):4781. doi: 10.3390/ma15144781.
The development of transparent electronics has advanced metal-oxide-semiconductor Thin-Film transistor (TFT) technology. In the field of flat-panel displays, as basic units, TFTs play an important role in achieving high speed, brightness, and screen contrast ratio to display information by controlling liquid crystal pixel dots. Oxide TFTs have gradually replaced silicon-based TFTs owing to their field-effect mobility, stability, and responsiveness. In the market, n-type oxide TFTs have been widely used, and their preparation methods have been gradually refined; however, p-Type oxide TFTs with the same properties are difficult to obtain. Fabricating p-Type oxide TFTs with the same performance as n-type oxide TFTs can ensure more energy-efficient complementary electronics and better transparent display applications. This paper summarizes the basic understanding of the structure and performance of the p-Type oxide TFTs, expounding the research progress and challenges of oxide transistors. The microstructures of the three types of p-Type oxides and significant efforts to improve the performance of oxide TFTs are highlighted. Finally, the latest progress and prospects of oxide TFTs based on p-Type oxide semiconductors and other p-Type semiconductor electronic devices are discussed.
透明电子学的发展推动了金属氧化物半导体薄膜晶体管(TFT)技术的进步。在平板显示器领域,作为基本单元,TFT通过控制液晶像素点在实现高速、高亮度和屏幕对比度以显示信息方面发挥着重要作用。氧化物TFT因其场效应迁移率、稳定性和响应性逐渐取代了硅基TFT。在市场上,n型氧化物TFT已被广泛使用,其制备方法也在不断完善;然而,具有相同性能的p型氧化物TFT却难以获得。制造与n型氧化物TFT具有相同性能的p型氧化物TFT能够确保更节能的互补电子学以及更好的透明显示应用。本文总结了对p型氧化物TFT结构和性能的基本认识,阐述了氧化物晶体管的研究进展和挑战。重点介绍了三种类型p型氧化物的微观结构以及为提高氧化物TFT性能所做的重大努力。最后,讨论了基于p型氧化物半导体的氧化物TFT及其他p型半导体电子器件的最新进展和前景。