Andriukaitis Deividas, Vargalis Rokas, Šerpytis Lukas, Drevinskas Tomas, Kornyšova Olga, Stankevičius Mantas, Bimbiraitė-Survilienė Kristina, Kaškonienė Vilma, Maruškas Audrius Sigitas, Jonušauskas Linas
Femtika Ltd., Saulėtekio Ave. 15, LT-10224 Vilnius, Lithuania.
Laser Research Center, Vilnius University, Saulėtekio Ave. 10, LT-10223 Vilnius, Lithuania.
Micromachines (Basel). 2022 Jul 26;13(8):1180. doi: 10.3390/mi13081180.
Expansion of the microfluidics field dictates the necessity to constantly improve technologies used to produce such systems. One of the approaches which are used more and more is femtosecond (fs) direct laser writing (DLW). The subtractive model of DLW allows for directly producing microfluidic channels via ablation in an extremely simple and cost-effective manner. However, channel surface roughens are always a concern when direct fs ablation is used, as it normally yields an RMS value in the range of a few µm. One solution to improve it is the usage of fs bursts. Thus, in this work, we show how fs burst mode ablation can be optimized to achieve sub-µm surface roughness in glass channel fabrication. It is done without compromising on manufacturing throughput. Furthermore, we show that a simple and cost-effective channel sealing methodology of thermal bonding can be employed. Together, it allows for production functional Tesla valves, which are tested. Demonstrated capabilities are discussed.
微流控领域的扩展决定了不断改进用于生产此类系统的技术的必要性。越来越多地被采用的一种方法是飞秒（fs）直接激光写入（DLW）。DLW的减法模型允许以极其简单且经济高效的方式通过烧蚀直接制造微流控通道。然而，当使用直接飞秒烧蚀时，通道表面粗糙度始终是一个问题，因为它通常会产生几微米范围内的均方根（RMS）值。一种改进方法是使用飞秒脉冲串。因此，在这项工作中，我们展示了如何优化飞秒脉冲串模式烧蚀，以在玻璃通道制造中实现亚微米级的表面粗糙度。这一过程不会影响制造产量。此外，我们表明可以采用一种简单且经济高效的热键合通道密封方法。综合起来，这使得能够生产出经过测试的功能性特斯拉阀。文中还讨论了所展示的能力。
