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用于薄膜晶体管的水诱导纳米级薄结晶铟镨氧化物沟道层

Water-Induced Nanometer-Thin Crystalline Indium-Praseodymium Oxide Channel Layers for Thin-Film Transistors.

作者信息

Xu Wangying, Xu Chuyu, Zhang Zhibo, Huang Weicheng, Lin Qiubao, Zhuo Shuangmu, Xu Fang, Liu Xinke, Zhu Deliang, Zhao Chun

机构信息

Department of Physics, School of Science, Jimei University, Xiamen 361021, China.

College of Materials Science and Engineering, Shenzhen University, Shenzhen 518000, China.

出版信息

Nanomaterials (Basel). 2022 Aug 22;12(16):2880. doi: 10.3390/nano12162880.

DOI:10.3390/nano12162880
PMID:36014745
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC9415306/
Abstract

We report water-induced nanometer-thin crystalline indium praseodymium oxide (In-Pr-O) thin-film transistors (TFTs) for the first time. This aqueous route enables the formation of dense ultrathin (6 nm) In-Pr-O thin films with near-atomic smoothness (0.2 nm). The role of Pr doping is investigated by a battery of experimental techniques. It is revealed that as the Pr doping ratio increases from 0 to 10%, the oxygen vacancy-related defects could be greatly suppressed, leading to the improvement of TFT device characteristics and durability. The optimized In-Pr-O TFT demonstrates state-of-the-art electrical performance with mobility of 17.03 ± 1.19 cm/Vs and on/off current ratio of ~10 based on Si/SiO substrate. This achievement is due to the low electronegativity and standard electrode potential of Pr, the high bond strength of Pr-O, same bixbyite structure of PrO and InO, and In-Pr-O channel's nanometer-thin and ultrasmooth nature. Therefore, the designed In-Pr-O channel holds great promise for next-generation transistors.

摘要

我们首次报道了水诱导的纳米级超薄晶体氧化铟镨（In-Pr-O）薄膜晶体管（TFT）。这种水相合成方法能够制备出具有近原子级平整度（约0.2纳米）的致密超薄（约6纳米）In-Pr-O薄膜。通过一系列实验技术研究了Pr掺杂的作用。结果表明，随着Pr掺杂比例从0增加到10%，与氧空位相关的缺陷可得到极大抑制，从而使TFT器件的特性和耐久性得到改善。基于Si/SiO₂ 衬底，优化后的In-Pr-O TFT展现出了先进的电学性能，迁移率为17.03±1.19 cm²/V·s，开/关电流比约为10⁷。这一成果归因于Pr的低电负性和标准电极电位、Pr-O的高键强、Pr₂O₃和In₂O₃相同的方铁锰矿结构以及In-Pr-O沟道的纳米级超薄和超光滑特性。因此，所设计的In-Pr-O沟道在下一代晶体管方面具有巨大潜力。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb1b/9415306/506c20b2a93a/nanomaterials-12-02880-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb1b/9415306/506c20b2a93a/nanomaterials-12-02880-g011.jpg
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https://cdn.ncbi.nlm.nih.gov/pmc/blobs/bb1b/9415306/31ffbe8bce63/nanomaterials-12-02880-g007.jpg
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