Department of Chemistry and the Materials Research Center, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA.
State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Opto-electronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu 610054, China.
Nat Mater. 2016 Apr;15(4):383-96. doi: 10.1038/nmat4599.
Metal oxides (MOs) are the most abundant materials in the Earth's crust and are ingredients in traditional ceramics. MO semiconductors are strikingly different from conventional inorganic semiconductors such as silicon and III-V compounds with respect to materials design concepts, electronic structure, charge transport mechanisms, defect states, thin-film processing and optoelectronic properties, thereby enabling both conventional and completely new functions. Recently, remarkable advances in MO semiconductors for electronics have been achieved, including the discovery and characterization of new transparent conducting oxides, realization of p-type along with traditional n-type MO semiconductors for transistors, p-n junctions and complementary circuits, formulations for printing MO electronics and, most importantly, commercialization of amorphous oxide semiconductors for flat panel displays. This Review surveys the uniqueness and universality of MOs versus other unconventional electronic materials in terms of materials chemistry and physics, electronic characteristics, thin-film fabrication strategies and selected applications in thin-film transistors, solar cells, diodes and memories.
金属氧化物(MOs)是地壳中最丰富的材料,也是传统陶瓷的成分。MO 半导体在材料设计理念、电子结构、电荷输运机制、缺陷态、薄膜处理和光电性能方面与传统的无机半导体(如硅和 III-V 化合物)有显著的不同,从而实现了传统和全新的功能。最近,MO 半导体在电子学方面取得了显著的进展,包括发现和表征新型透明导电氧化物,实现了晶体管、p-n 结和互补电路的传统 n 型 MO 半导体的 p 型以及与之同时实现,用于 MO 电子器件的配方,以及最重要的是,用于平板显示器的非晶氧化物半导体的商业化。本综述从材料化学和物理、电子特性、薄膜制备策略以及在薄膜晶体管、太阳能电池、二极管和存储器中的应用等方面,考察了 MOs 相对于其他非传统电子材料的独特性和普遍性。