Li Yuqing, Zhao Yuyan, Wang Xiaoqian, Liu Wanli, He Jiazhen, Luo Xuemin, Liu Jinfeng, Liu Yong
International School of Materials Science and Engineering (ISMSE), State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China.
Southwest Institute of Technical Physics, Chengdu 610041, China.
Materials (Basel). 2023 Jul 3;16(13):4795. doi: 10.3390/ma16134795.
Currently, as shown by large-scale research on two-dimensional materials in the field of nanoelectronics and catalysis, the construction of large-area two-dimensional materials is crucial for the development of devices and their application in photovoltaics, sensing, optoelectronics, and energy generation/storage. Here, using atmospheric-pressure chemical vapor deposition, we developed a method to regulate growth conditions according to the growth mechanism for WSe and MoSe materials. By accurately controlling the hydrogen flux within the range of 1 sccm and the distance between the precursor and the substrate, we obtained large-size films of single atomic layers with thicknesses of only about 1 nm. When growing the samples, we could not only obtain a 100 percent proportion of samples with the same shape, but the samples could also be glued into pieces of 700 μm and above in size, changing the shape and making it possible to reach the millimeter/submillimeter level visible to the naked eye. Our method is an effective method for the growth of large-area films with universal applicability.
目前,纳米电子学和催化领域对二维材料的大规模研究表明,大面积二维材料的构建对于器件的开发及其在光伏、传感、光电子和能量产生/存储中的应用至关重要。在此,我们利用常压化学气相沉积法,根据WSe和MoSe材料的生长机制开发了一种调节生长条件的方法。通过在1 sccm范围内精确控制氢气流以及前驱体与衬底之间的距离,我们获得了厚度仅约1 nm的大尺寸单原子层薄膜。在生长样品时,我们不仅能够获得形状相同的样品的100%比例,而且样品还可以被粘合成尺寸在700μm及以上的片材,改变形状并使其有可能达到肉眼可见的毫米/亚毫米级别。我们的方法是一种具有普遍适用性的大面积薄膜生长的有效方法。