Hu Er-Tao, Zhao Hongzhi, Wang Min, Wang Jing, Cai Qing-Yuan, Yu Kehan, Wei Wei
College of Electronic and Optical Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210023, China.
Department of Basic Education, Tongda College of Nanjing University of Posts and Telecommunications, Yangzhou 225127, China.
Nanomaterials (Basel). 2023 Jul 19;13(14):2108. doi: 10.3390/nano13142108.
Transparent conductors (TC) have been widely applied in a wide range of optoelectronic devices. Nevertheless, different transparent spectral bands are always needed for particular applications. In this work, indium tin oxide (ITO)-free TCs with tunable transparent bands based on the film structure of TiO/Ag/AZO (Al-doped ZnO) were designed by the transfer matrix method and deposited by magnetron sputtering. The transparent spectra and figure-of-merit (FOM) were effectively adjusted by precisely controlling the Ag layer's thickness. The fabricated as-deposited samples exhibited an average optical transmittance larger than 88.3% (400-700 nm), a sheet resistance lower than 7.7 Ω.sq, a low surface roughness of about 1.4 nm, and mechanical stability upon 1000 bending cycles. Moreover, the samples were able to hold optical and electrical properties after annealing at 300 °C for 60 min, but failed at 400 °C even for 30 min.
透明导体（TC）已广泛应用于各种光电器件中。然而，特定应用总是需要不同的透明光谱带。在这项工作中，基于TiO/Ag/AZO（铝掺杂氧化锌）的薄膜结构，通过转移矩阵法设计了具有可调透明带的无铟锡氧化物（ITO）透明导体，并通过磁控溅射进行沉积。通过精确控制银层的厚度，有效地调整了透明光谱和品质因数（FOM）。制备的沉积态样品表现出大于88.3%（400 - 700 nm）的平均光学透过率、低于7.7 Ω/sq的方块电阻、约1.4 nm的低表面粗糙度以及在1000次弯曲循环下的机械稳定性。此外，样品在300°C退火60分钟后能够保持光学和电学性能，但在400°C下即使退火30分钟也会失效。
