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金属-绝缘体-金属波导平台中的异质集成发光二极管和光电探测器。

Heterogeneously integrated light emitting diodes and photodetectors in the metal-insulator-metal waveguide platform.

作者信息

Kwon Kyungmok, Park Junghoon, You Jong-Bum, Yu Kyoungsik

机构信息

School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea.

Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, CA 94720, USA.

出版信息

Nanophotonics. 2023 May 3;12(13):2603-2610. doi: 10.1515/nanoph-2022-0784. eCollection 2023 Jun.

DOI:10.1515/nanoph-2022-0784
PMID:39633764
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11501676/
Abstract

We demonstrate heterogeneous integration of active semiconductor materials into the conventional passive metal-insulator-metal (MIM) waveguides to provide compact on-chip light generation and detection capabilities for chip-scale active nanophotonic platforms. Depending on its bias conditions, a metal-semiconductor-metal section can function as either a light emitting diode or a photodetector directly connected to the MIM waveguides. We experimentally verify the independent and combined operations of electrically-driven on-chip light sources and photodetectors.

摘要

我们展示了将有源半导体材料异质集成到传统无源金属-绝缘体-金属（MIM）波导中，以为芯片级有源纳米光子平台提供紧凑的片上光产生和检测能力。根据其偏置条件，金属-半导体-金属部分可以直接连接到MIM波导，充当发光二极管或光电探测器。我们通过实验验证了电驱动片上光源和光电探测器的独立和组合操作。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fc3/11501676/4b74461af8c9/j_nanoph-2022-0784_fig_004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fc3/11501676/122addc602aa/j_nanoph-2022-0784_fig_001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fc3/11501676/9d2f01509b7b/j_nanoph-2022-0784_fig_002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fc3/11501676/635c1d35dfaf/j_nanoph-2022-0784_fig_003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fc3/11501676/4b74461af8c9/j_nanoph-2022-0784_fig_004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fc3/11501676/122addc602aa/j_nanoph-2022-0784_fig_001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fc3/11501676/9d2f01509b7b/j_nanoph-2022-0784_fig_002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fc3/11501676/635c1d35dfaf/j_nanoph-2022-0784_fig_003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/0fc3/11501676/4b74461af8c9/j_nanoph-2022-0784_fig_004.jpg

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