He Yunlong, Sheng Baisong, Lu Xiaoli, Chen Guran, Liu Peng, Zhou Ying, Wang Xichen, Chen Weiwei, Wang Lei, Yang Jun, Zheng Xuefeng, Ma Xiaohua, Hao Yue
State Key Laboratory of Wide Bandgap Semiconductor Devices and Integrated Technology, National Engineering Research Center of Wide Band-Gap Semiconductor, School of Microelectronics, Xidian University, Xi'an 710071, China.
State Key Laboratory of Wide Bandgap Semiconductor Devices and Integrated Technology, National Center of Technology Innovation for Wide-Bandgap Semiconductors of Nanjing Co., Ltd., Nanjing 210016, China.
Nanomaterials (Basel). 2024 Dec 18;14(24):2035. doi: 10.3390/nano14242035.
This study systematically investigates the effects of anode metals (Ti/Au and Ni/Au) with different work functions on the electrical and temperature characteristics of β-GaO-based Schottky barrier diodes (SBDs), junction barrier Schottky diodes (JBSDs) and P-N diodes (PNDs), utilizing Silvaco TCAD simulation software, device fabrication and comparative analysis. From the perspective of transport characteristics, it is observed that the SBD exhibits a lower turn-on voltage and a higher current density. Notably, the V of the Ti/Au anode SBD is merely 0.2 V, which is the lowest recorded value in the existing literature. The V and current trend of two types of PNDs are nearly consistent, confirming that the contact between Ti/Au or Ni/Au and NiO is ohmic. A theoretical derivation reveals the basic principles of the different contact resistances and current variations. With the combination of SBD and PND, the V, current density, and variation rate of the JBSD lie between those of the SBD and PND. In terms of temperature characteristics, all diodes can work well at 200 °C, with both current density and V showing a decreasing trend as the temperature increases. Among them, the PND with a Ni/Au anode exhibits the best thermal stability, with reductions in V and current density of 8.20% and 25.31%, respectively, while the SBD with a Ti/Au anode shows the poorest performance, with reductions of 98.56% and 30.73%. Finally, the reverse breakdown (BV) characteristics of all six devices are tested. The average BV values for the PND with Ti/Au and Ni/Au anodes reach 1575 V and 1550 V, respectively. Moreover, although the V of the JBSD decreases to 0.24 V, its average BV is approximately 220 V. This work could provide valuable insights for the future application of β-GaO-based diodes in high-power and low-power consumption systems.
本研究利用Silvaco TCAD模拟软件、器件制造和对比分析,系统地研究了具有不同功函数的阳极金属(Ti/Au和Ni/Au)对基于β-GaO的肖特基势垒二极管(SBD)、结型势垒肖特基二极管(JBSD)和P-N二极管(PND)的电学和温度特性的影响。从传输特性的角度来看,观察到SBD表现出较低的开启电压和较高的电流密度。值得注意的是,Ti/Au阳极SBD的V仅为0.2V,这是现有文献中记录的最低值。两种类型的PND的V和电流趋势几乎一致,证实了Ti/Au或Ni/Au与NiO之间的接触是欧姆接触。理论推导揭示了不同接触电阻和电流变化的基本原理。结合SBD和PND,JBSD的V、电流密度和变化率介于SBD和PND之间。在温度特性方面,所有二极管在200°C时都能良好工作,随着温度升高,电流密度和V均呈下降趋势。其中,Ni/Au阳极的PND表现出最佳的热稳定性,V和电流密度分别降低了8.20%和25.31%,而Ti/Au阳极的SBD表现最差,降低了98.56%和30.73%。最后,测试了所有六种器件的反向击穿(BV)特性。Ti/Au和Ni/Au阳极的PND的平均BV值分别达到1575V和1550V。此外,尽管JBSD的V降至0.24V,但其平均BV约为220V。这项工作可为基于β-GaO的二极管在高功率和低功耗系统中的未来应用提供有价值的见解。