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外延混合维度二硫化钼纳米鳍-纳米带杂化物及其在电子和光电器件中的集成。

Epitaxial Mixed-Dimensional MoS Nanofin-Nanoribbon Hybrids and Their Integration into Electronic and Optoelectronic Devices.

作者信息

Danieli Yarden, Houben Lothar, Rechav Katya, Brontvein Olga, Kaplan-Ashiri Ifat, Pinkas Iddo, Vilan Ayelet, Joselevich Ernesto

机构信息

Department of Molecular Chemistry and Materials Science, Weizmann Institute of Science, Rehovot 7610001, Israel.

Department of Chemical Research Support, Weizmann Institute of Science, Rehovot 7610001, Israel.

出版信息

ACS Appl Mater Interfaces. 2025 May 14;17(19):28336-28349. doi: 10.1021/acsami.5c00308. Epub 2025 Apr 29.

Abstract

Transition metal dichalcogenides, notably MoS, have garnered substantial attention owing to their excellent optical and electrical properties. While various methods have been employed to grow MoS, resulting in nanostructures with diverse dimensionalities, controlling the lattice orientation and synthesizing aligned nanostructures beyond 2D remain a formidable challenge. In this study, we report the epitaxial growth of aligned MoS nanofin-nanoribbon hybrids, each consisting of a horizontal nanoribbon with a vertical lamellar structure ("fin") in its center. Structural analysis reveals epitaxial relations that induce the growth into three isomorphic orientations following the 3-fold symmetry of the -plane sapphire substrate. The nanofin-nanoribbon hybrid was integrated into a fin-channel photodetector with response times on the scale of tens of μs and high photocurrent. Furthermore, the nanofin-nanoribbon hybrids are incorporated into n-type "fin-FET" transistors, showing on-off ratios on the order of ∼10 at room temperature. The performance of these devices is discussed in terms of the efficient fabrication process, devoid of postgrowth steps, and the unique dimensionality of the device, which realizes a high optical path in the fin-shaped channel. This work demonstrates the integration of MoS into efficient fin-channel electronic and optoelectronic devices, laying the foundation for large-scale integration of TMDs into devices with nonstandard channel configurations.

摘要

过渡金属二硫属化物,尤其是二硫化钼(MoS₂),因其优异的光学和电学性能而备受关注。虽然已经采用了各种方法来生长MoS₂,得到了具有不同维度的纳米结构,但控制晶格取向并合成超越二维的排列整齐的纳米结构仍然是一项艰巨的挑战。在本研究中,我们报道了排列整齐的MoS₂纳米鳍-纳米带杂化结构的外延生长,每个杂化结构都由一个水平纳米带组成,其中心具有垂直的层状结构(“鳍”)。结构分析揭示了外延关系,这种关系使得生长遵循蓝宝石衬底c平面的三重对称性,形成三种同构取向。纳米鳍-纳米带杂化结构被集成到一个鳍式沟道光电探测器中,其响应时间在几十微秒量级,且具有高光电流。此外,纳米鳍-纳米带杂化结构被并入n型“鳍式场效应晶体管”(fin-FET)中,在室温下显示出约10的开/关比。这些器件的性能是根据高效的制造工艺(无需生长后步骤)以及器件独特的维度来讨论的,该维度在鳍状沟道中实现了高光路。这项工作展示了将MoS₂集成到高效的鳍式沟道电子和光电器件中,为将过渡金属二硫属化物大规模集成到具有非标准沟道配置的器件奠定了基础。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/94eb/12086835/72ba9f5bb068/am5c00308_0001.jpg

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