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在轴向上生长于硅(001)上的砷化铟量子点微盘发光器和光电探测器的单片集成演示。

Demonstration of Monolithic Integration of InAs Quantum Dot Microdisk Light Emitters and Photodetectors Directly Grown on On-Axis Silicon (001).

作者信息

Liu Shuaicheng, Liu Hao, Ye Jihong, Zhai Hao, Xiong Weihong, Yang Yisu, Wang Jun, Wang Qi, Huang Yongqing, Ren Xiaomin

机构信息

State Key Laboratory of Information Photonics and Optical Communications, Beijing University of Posts and Telecommunications, Beijing 100876, China.

出版信息

Micromachines (Basel). 2025 Jul 31;16(8):897. doi: 10.3390/mi16080897.

DOI:10.3390/mi16080897
PMID:40872404
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC12388254/
Abstract

Silicon-based microcavity quantum dot lasers are attractive candidates for on-chip light sources in photonic integrated circuits due to their small size, low power consumption, and compatibility with silicon photonic platforms. However, integrating components like quantum dot lasers and photodetectors on a single chip remains challenging due to material compatibility issues and mode field mismatch problems. In this work, we have demonstrated monolithic integration of an InAs quantum dot microdisk light emitter, waveguide, and photodetector on a silicon platform using a shared epitaxial structure. The photodetector successfully monitored variations in light emitter output power, experimentally proving the feasibility of this integrated scheme. This work represents a key step toward multifunctional integrated photonic systems. Future efforts will focus on enhancing the light emitter output power, improving waveguide efficiency, and scaling up the integration density for advanced applications in optical communication.

摘要

基于硅的微腔量子点激光器因其尺寸小、功耗低以及与硅光子平台的兼容性,而成为光子集成电路中片上光源的有吸引力的候选者。然而,由于材料兼容性问题和模式场失配问题,将量子点激光器和光电探测器等组件集成在单个芯片上仍然具有挑战性。在这项工作中,我们展示了使用共享外延结构在硅平台上实现InAs量子点微盘发光器、波导和光电探测器的单片集成。光电探测器成功监测了发光器输出功率的变化,通过实验证明了这种集成方案的可行性。这项工作代表了迈向多功能集成光子系统的关键一步。未来的努力将集中在提高发光器输出功率、提高波导效率以及扩大集成密度,以用于光通信中的先进应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/164844074ed3/micromachines-16-00897-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/24f1541f0a9a/micromachines-16-00897-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/52771ec1bd61/micromachines-16-00897-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/d50c2a505098/micromachines-16-00897-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/0e59719da061/micromachines-16-00897-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/41b7d8ce42e5/micromachines-16-00897-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/1cb4eef9d97d/micromachines-16-00897-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/164844074ed3/micromachines-16-00897-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/24f1541f0a9a/micromachines-16-00897-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/52771ec1bd61/micromachines-16-00897-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/d50c2a505098/micromachines-16-00897-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/0e59719da061/micromachines-16-00897-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/41b7d8ce42e5/micromachines-16-00897-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/1cb4eef9d97d/micromachines-16-00897-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/74cc/12388254/164844074ed3/micromachines-16-00897-g007.jpg

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本文引用的文献

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Monolithic integration of embedded III-V lasers on SOI.在绝缘体上硅(SOI)上实现嵌入式III-V族激光器的单片集成。
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