Department of Chemistry and Biochemistry, California Nanosystems Institute, University of California, Los Angeles, California 90095, USA.
Nano Lett. 2009 Dec;9(12):4539-43. doi: 10.1021/nl903030h.
We report the synthesis of vertical silicon nanowire array through a two-step metal-assisted chemical etching of highly doped n-type silicon (100) wafers in a solution of hydrofluoric acid and hydrogen peroxide. The morphology of the as-grown silicon nanowires is tunable from solid nonporous nanowires, nonporous/nanoporous core/shell nanowires, to entirely nanoporous nanowires by controlling the hydrogen peroxide concentration in the etching solution. The porous silicon nanowires retain the single crystalline structure and crystallographic orientation of the starting silicon wafer and are electrically conductive and optically active with visible photoluminescence. The combination of electronic and optical properties in the porous silicon nanowires may provide a platform for novel optoelectronic devices for energy harvesting, conversion, and biosensing.
我们通过两步法在 HF 和 H2O2 的混合溶液中对高掺杂 n 型硅(100)衬底进行金属辅助化学刻蚀,制备出垂直的硅纳米线阵列。通过控制刻蚀液中 H2O2 的浓度,可以将所生长的硅纳米线的形貌从实心无孔纳米线、无孔/纳米孔核/壳纳米线调变为全多孔纳米线。多孔硅纳米线保留了起始硅片的单晶结构和晶向,具有导电性和可见光发光的光学活性。多孔硅纳米线在电子和光学性质方面的结合可能为用于能量收集、转换和生物传感的新型光电设备提供平台。