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在坑型图案化 Si(001) 衬底上的 SiGe 岛的微光致发光和完美有序。

Microphotoluminescence and perfect ordering of SiGe islands on pit-patterned Si(001) substrates.

机构信息

Institute of Semiconductor and Solid State Physics, Johannes Kepler University Linz, Austria.

出版信息

Nanotechnology. 2011 Apr 22;22(16):165302. doi: 10.1088/0957-4484/22/16/165302. Epub 2011 Mar 11.

Abstract

We show that both the morphology and the optoelectronic properties of SiGe islands growing in the pits of periodically pre-patterned Si(001) substrates are determined by the amount of Ge deposited per unit cell of the pattern. Pit-periods (p) ranging from 300 to 900 nm were investigated, and Ge growth was performed by molecular beam epitaxy (MBE) at temperatures of 690 and 760 °C. The ordered SiGe islands show photoluminescence (PL) emission, which becomes almost completely quenched, once a critical island volume is exceeded. By atomic force and transmission electron microscope images we identify the transition from pyramid-shaped to dome-shaped islands with increasing p. Eventually, the nucleation of dislocations in the islands leads to PL quenching. Below a critical Ge coverage a narrowing and a blue shift of the PL emission is observed, as compared to islands grown on a planar reference area of the same sample.

摘要

我们表明,在周期性预图案化的 Si(001) 衬底的凹坑中生长的 SiGe 岛的形态和光电特性取决于每个图案单元沉积的 Ge 量。研究了凹坑周期(p)范围为 300 至 900nm 的情况,并在 690 和 760°C 的温度下通过分子束外延(MBE)进行 Ge 生长。有序的 SiGe 岛显示出光致发光(PL)发射,一旦超过临界岛体积,PL 发射几乎完全被猝灭。通过原子力和透射电子显微镜图像,我们确定了随着 p 的增加,从金字塔形到圆顶形岛的转变。最终,在岛中发生位错的成核导致 PL 猝灭。与在同一样品的平面参考区域上生长的岛相比,在低于临界 Ge 覆盖的情况下,PL 发射会变窄和蓝移。

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