• 文献检索
  • 文档翻译
  • 深度研究
  • 学术资讯
  • Suppr Zotero 插件Zotero 插件
  • 邀请有礼
  • 套餐&价格
  • 历史记录
应用&插件
Suppr Zotero 插件Zotero 插件浏览器插件Mac 客户端Windows 客户端微信小程序
定价
高级版会员购买积分包购买API积分包
服务
文献检索文档翻译深度研究API 文档MCP 服务
关于我们
关于 Suppr公司介绍联系我们用户协议隐私条款
关注我们

Suppr 超能文献

核心技术专利:CN118964589B侵权必究
粤ICP备2023148730 号-1Suppr @ 2026

文献检索

告别复杂PubMed语法,用中文像聊天一样搜索,搜遍4000万医学文献。AI智能推荐,让科研检索更轻松。

立即免费搜索

文件翻译

保留排版,准确专业,支持PDF/Word/PPT等文件格式,支持 12+语言互译。

免费翻译文档

深度研究

AI帮你快速写综述,25分钟生成高质量综述,智能提取关键信息,辅助科研写作。

立即免费体验

利用定向自组装实现亚 10nm 分辨率的纳米转印。

Nanotransfer printing with sub-10 nm resolution realized using directed self-assembly.

机构信息

Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Daejeon 305-701, Republic of Korea.

出版信息

Adv Mater. 2012 Jul 10;24(26):3526-31. doi: 10.1002/adma.201200356. Epub 2012 Jun 5.

DOI:10.1002/adma.201200356
PMID:22674448
Abstract

An extraordinarily facile sub-10 nm fabrication method using the synergic combination of nanotransfer printing and the directed self-assembly of block copolymers is introduced. The approach is realized by achieving the uniform self-assembly of polydimethylsiloxane (PDMS)-containing block copolymers on a PDMS mold through the stabilization of the block copolymer thin films. This simple printing method can be applied on oxides, metals, polymers, and non-planar substrates without pretreatments. The fabrication of well-aligned metallic and polymeric functional nanostructures and crossed wire structures is also presented.

摘要

介绍了一种使用纳米转移印刷和嵌段共聚物定向自组装协同组合的非常简便的亚 10nm 制造方法。该方法通过在 PDMS 模具上实现含 PDMS 的嵌段共聚物薄膜的稳定化,从而在 PDMS 模具上实现均匀的自组装来实现。这种简单的印刷方法可以应用于氧化物、金属、聚合物和非平面衬底,无需预处理。还介绍了金属和聚合物功能纳米结构和交叉线结构的良好对准制造。

相似文献

1
Nanotransfer printing with sub-10 nm resolution realized using directed self-assembly.利用定向自组装实现亚 10nm 分辨率的纳米转印。
Adv Mater. 2012 Jul 10;24(26):3526-31. doi: 10.1002/adma.201200356. Epub 2012 Jun 5.
2
High-resolution nanotransfer printing applicable to diverse surfaces via interface-targeted adhesion switching.基于界面靶向黏附转换的适用于多种表面的高分辨率纳传递印刷。
Nat Commun. 2014 Nov 10;5:5387. doi: 10.1038/ncomms6387.
3
Hierarchical nanostructures by sequential self-assembly of styrene-dimethylsiloxane block copolymers of different periods.通过不同周期的苯乙烯-二甲基硅氧烷嵌段共聚物的顺序自组装得到的分级纳米结构。
Adv Mater. 2011 Feb 1;23(5):634-9. doi: 10.1002/adma.201002999. Epub 2010 Dec 6.
4
Fabrication of ultra-fine nanostructures using edge transfer printing.采用边缘转印技术制造超精细纳米结构。
Nanoscale. 2012 Mar 21;4(6):1939-47. doi: 10.1039/c2nr11829g. Epub 2012 Feb 16.
5
Topographically designed hybrid nanostructures via nanotransfer printing and block copolymer self-assembly.通过纳米转移印刷和嵌段共聚物自组装制备的拓扑结构混合纳米结构。
Nanoscale. 2021 Jul 7;13(25):11161-11168. doi: 10.1039/d1nr02358f. Epub 2021 Jun 17.
6
Tailoring nanostructures using copolymer nanoimprint lithography.使用共聚物纳米压印光刻技术对纳米结构进行定制。
Adv Mater. 2012 Apr 17;24(15):1952-5. doi: 10.1002/adma.201103532. Epub 2012 Mar 21.
7
Direct Printing of Ultrathin Block Copolymer Film with Nano-in-Micro Pattern Structures.具有微纳结构的超薄嵌段共聚物薄膜的直接印刷
Adv Sci (Weinh). 2023 Oct;10(29):e2303412. doi: 10.1002/advs.202303412. Epub 2023 Aug 21.
8
Molecular transfer printing using block copolymers.使用嵌段共聚物的分子传递印刷。
ACS Nano. 2010 Feb 23;4(2):599-609. doi: 10.1021/nn901342j.
9
Oligosaccharide/silicon-containing block copolymers with 5 nm features for lithographic applications.具有 5nm 特征的寡糖/含硅嵌段共聚物,用于光刻应用。
ACS Nano. 2012 Apr 24;6(4):3424-33. doi: 10.1021/nn300459r. Epub 2012 Apr 12.
10
Direct printing of nanostructures by electrostatic autofocussing of ink nanodroplets.通过墨水滴的静电自聚焦直接打印纳米结构。
Nat Commun. 2012 Jun 12;3:890. doi: 10.1038/ncomms1891.

引用本文的文献

1
Advances in lithographic techniques for precision nanostructure fabrication in biomedical applications.用于生物医学应用中精密纳米结构制造的光刻技术进展。
Discov Nano. 2023 Dec 11;18(1):153. doi: 10.1186/s11671-023-03938-x.
2
Thermal and Bulk Properties of Triblock Terpolymers and Modified Derivatives towards Novel Polymer Brushes.用于新型聚合物刷的三嵌段三元共聚物及其改性衍生物的热性能和本体性能
Polymers (Basel). 2023 Feb 8;15(4):848. doi: 10.3390/polym15040848.
3
Priming self-assembly pathways by stacking block copolymers.通过堆叠嵌段共聚物来引发自组装途径。
Nat Commun. 2022 Nov 14;13(1):6947. doi: 10.1038/s41467-022-34729-0.
4
Study of the ordered assembly morphologies of diblock copolymers on the same substrate.双嵌段共聚物在同一基底上的有序组装形态研究。
RSC Adv. 2022 Oct 5;12(44):28376-28387. doi: 10.1039/d2ra04803e. eCollection 2022 Oct 4.
5
Controlled self-assembly of block copolymers in printed sub-20 nm cross-bar structures.在印刷的亚20纳米交叉棒结构中嵌段共聚物的可控自组装。
Nanoscale Adv. 2021 Aug 2;3(17):5083-5089. doi: 10.1039/d1na00357g. eCollection 2021 Aug 25.
6
Thermally assisted nanotransfer printing with sub-20-nm resolution and 8-inch wafer scalability.具有亚20纳米分辨率和8英寸晶圆可扩展性的热辅助纳米转移印刷。
Sci Adv. 2020 Jul 29;6(31):eabb6462. doi: 10.1126/sciadv.abb6462. eCollection 2020 Jul.
7
Macroscopic Alignment of Block Copolymers on Silicon Substrates by Laser Annealing.通过激光退火实现嵌段共聚物在硅衬底上的宏观取向
ACS Nano. 2020 Apr 28;14(4):4805-4815. doi: 10.1021/acsnano.0c00696. Epub 2020 Mar 17.
8
Non-native three-dimensional block copolymer morphologies.非-native 三维嵌段共聚物形态。
Nat Commun. 2016 Dec 22;7:13988. doi: 10.1038/ncomms13988.
9
Multilayer block copolymer meshes by orthogonal self-assembly.通过正交自组装制备的多层嵌段共聚物网
Nat Commun. 2016 Jan 22;7:10518. doi: 10.1038/ncomms10518.
10
Arbitrary lattice symmetries via block copolymer nanomeshes.通过嵌段共聚物纳米网实现任意晶格对称性
Nat Commun. 2015 Jun 23;6:7448. doi: 10.1038/ncomms8448.