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转移褶皱的 Al2O3 以获得高拉伸和透明的石墨烯-碳纳米管晶体管。

Transferred wrinkled Al2O3 for highly stretchable and transparent graphene-carbon nanotube transistors.

出版信息

Nat Mater. 2013 May;12(5):403-9. doi: 10.1038/nmat3572. Epub 2013 Mar 3.

Abstract

Despite recent progress in producing transparent and bendable thin-film transistors using graphene and carbon nanotubes, the development of stretchable devices remains limited either by fragile inorganic oxides or polymer dielectrics with high leakage current. Here we report the fabrication of highly stretchable and transparent field-effect transistors combining graphene/single-walled carbon nanotube (SWCNT) electrodes and a SWCNT-network channel with a geometrically wrinkled inorganic dielectric layer. The wrinkled Al2O3 layer contained effective built-in air gaps with a small gate leakage current of 10(-13) A. The resulting devices exhibited an excellent on/off ratio of ~10(5), a high mobility of ~40 cm(2) V(-1) s(-1) and a low operating voltage of less than 1 V. Importantly, because of the wrinkled dielectric layer, the transistors retained performance under strains as high as 20% without appreciable leakage current increases or physical degradation. No significant performance loss was observed after stretching and releasing the devices for over 1,000 times. The sustainability and performance advances demonstrated here are promising for the adoption of stretchable electronics in a wide variety of future applications.

摘要

尽管最近在使用石墨烯和碳纳米管制造透明可弯曲薄膜晶体管方面取得了进展,但可拉伸器件的发展仍然受到脆弱的无机氧化物或具有高漏电流的聚合物电介质的限制。在这里,我们报告了一种高度可拉伸和透明的场效应晶体管的制造,该晶体管结合了石墨烯/单壁碳纳米管(SWCNT)电极和具有几何褶皱无机介电层的 SWCNT 网络通道。褶皱的 Al2O3 层含有有效的内置气隙,栅极漏电流低至 10(-13) A。所得器件表现出优异的开关比约为 10(5),迁移率约为 40 cm(2) V(-1) s(-1),工作电压低于 1 V。重要的是,由于褶皱介电层,晶体管在高达 20%的应变下仍能保持性能,而漏电流增加或物理退化不明显。拉伸和释放器件超过 1000 次后,没有观察到性能明显下降。这里展示的可持续性和性能进步为在各种未来应用中采用可拉伸电子产品提供了希望。

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