Li Yanlu, Baets Roel
Department of Information Technology (INTEC), Ghent-University-IMEC, Ghent, Belgium.
Opt Express. 2013 Jun 3;21(11):13342-50. doi: 10.1364/OE.21.013342.
A miniaturized homodyne laser Doppler vibrometer (LDV) with a compact 90° optical hybrid is experimentally demonstrated on a CMOS compatible silicon-on-insulator (SOI) platform. Optical components on this platform usually have inadequate suppressions of spurious reflections, which significantly influence the performance of the LDV. Numerical compensation methods are implemented to effectively decrease the impact of these spurious reflections. With the help of these compensation methods, measurements for both super-half-wavelength and sub-half-wavelength vibrations are demonstrated. Results show that the minimal detectable velocity is around 1.2 μm/s.
在一个与CMOS兼容的绝缘体上硅（SOI）平台上，通过实验展示了一种带有紧凑90°光学混合器的小型化零差激光多普勒振动计（LDV）。该平台上的光学元件通常对杂散反射的抑制不足，这会显著影响LDV的性能。实施了数值补偿方法以有效降低这些杂散反射的影响。借助这些补偿方法，展示了对超半波长和亚半波长振动的测量。结果表明，最小可检测速度约为1.2μm/s。
