Fakultät für Physik and CeNIDE, Universität Duisburg-Essen, Lotharstr. 1, 47057 Duisburg, Germany.
Institut für Festkörperphysik, Technische Universität Berlin, Hardenbergstr. 36, 10623 Berlin, Germany.
Beilstein J Nanotechnol. 2014 Mar 13;5:291-7. doi: 10.3762/bjnano.5.32. eCollection 2014.
Thinning out MoS2 crystals to atomically thin layers results in the transition from an indirect to a direct bandgap material. This makes single layer MoS2 an exciting new material for electronic devices. In MoS2 devices it has been observed that the choice of materials, in particular for contact and gate, is crucial for their performance. This makes it very important to study the interaction between ultrathin MoS2 layers and materials employed in electronic devices in order to optimize their performance. In this work we used NC-AFM in combination with quantitative KPFM to study the influence of the substrate material and the processing on single layer MoS2 during device fabrication. We find a strong influence of contaminations caused by the processing on the surface potential of MoS2. It is shown that the charge transfer from the substrate is able to change the work function of MoS2 by about 40 meV. Our findings suggest two things. First, the necessity to properly clean devices after processing as contaminations have a great impact on the surface potential. Second, that by choosing appropriate materials the work function can be modified to reduce contact resistance.
将 MoS2 晶体减薄至原子层厚度会导致从间接带隙材料转变为直接带隙材料。这使得单层 MoS2 成为电子器件中令人兴奋的新材料。在 MoS2 器件中,已经观察到材料的选择,特别是接触材料和栅极材料,对其性能至关重要。因此,研究超薄 MoS2 层与电子器件中使用的材料之间的相互作用以优化其性能非常重要。在这项工作中,我们使用 NC-AFM 结合定量 KPFM 来研究在器件制造过程中衬底材料和处理对单层 MoS2 的影响。我们发现处理过程中产生的污染物对 MoS2 表面电势有很强的影响。结果表明,衬底的电荷转移能够使 MoS2 的功函数改变约 40meV。我们的研究结果表明了两点。首先,处理后需要适当清洁器件,因为污染物对表面电势有很大影响。其次,可以通过选择合适的材料来修改功函数以降低接触电阻。