Chen Peng, Mitsui Toshiyuki, Farmer Damon B, Golovchenko Jene, Gordon Roy G, Branton Daniel
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Nano Lett. 2004 Jun 25;4(7):1333-1337. doi: 10.1021/nl0494001.
Atomic layer deposition of alumina enhanced the molecule sensing characteristics of fabricated nanopores by fine-tuning their surface properties, reducing 1/f noise, neutralizing surface charge to favor capture of DNA and other negative polyelectrolytes, and controlling the diameter and aspect ratio of the pores with near single Ångstrom precision. The control over the chemical and physical nature of the pore surface provided by atomic layer deposition produced a higher yield of functional nanopore detectors.
氧化铝的原子层沉积通过微调其表面性质、降低1/f噪声、中和表面电荷以利于捕获DNA和其他带负电的聚电解质,并以接近单埃的精度控制孔的直径和纵横比,增强了所制备纳米孔的分子传感特性。原子层沉积对孔表面化学和物理性质的控制产生了更高产率的功能性纳米孔探测器。