Santos A, Deen M J, Marsal L F
School of Chemical Engineering, The University of Adelaide, N. Engineering Building, 5005 Adelaide, Australia.
Nanotechnology. 2015 Jan 30;26(4):042001. doi: 10.1088/0957-4484/26/4/042001. Epub 2015 Jan 8.
In the last decade, some low-cost nanofabrication technologies used in several disciplines of nanotechnology have demonstrated promising results in terms of versatility and scalability for producing innovative nanostructures. While conventional nanofabrication technologies such as photolithography are and will be an important part of nanofabrication, some low-cost nanofabrication technologies have demonstrated outstanding capabilities for large-scale production, providing high throughputs with acceptable resolution and broad versatility. Some of these nanotechnological approaches are reviewed in this article, providing information about the fundamentals, limitations and potential future developments towards nanofabrication processes capable of producing a broad range of nanostructures. Furthermore, in many cases, these low-cost nanofabrication approaches can be combined with traditional nanofabrication technologies. This combination is considered a promising way of generating innovative nanostructures suitable for a broad range of applications such as in opto-electronics, nano-electronics, photonics, sensing, biotechnology or medicine.
在过去十年中,纳米技术多个学科所使用的一些低成本纳米制造技术,在生产创新纳米结构的通用性和可扩展性方面已展现出令人期待的成果。虽然诸如光刻等传统纳米制造技术过去是且将来仍会是纳米制造的重要组成部分,但一些低成本纳米制造技术已在大规模生产方面展现出卓越能力,能以可接受的分辨率和广泛的通用性实现高产量。本文对其中一些纳米技术方法进行了综述,提供了有关能够生产多种纳米结构的纳米制造工艺的基本原理、局限性及未来潜在发展的信息。此外,在许多情况下,这些低成本纳米制造方法可与传统纳米制造技术相结合。这种结合被认为是生成适用于广泛应用(如光电子学、纳米电子学、光子学、传感、生物技术或医学)的创新纳米结构的一种有前景的方式。